Variable shape antenna etching system and antenna formed thereby
First Claim
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1. An antenna shaping device comprising:
- depositing means for depositing a photoresist layer on a substrate on a moveable support;
illuminating means for illuminating the photoresist with light intensity from plural sources producing a predetermined interference pattern thereon to expose said photoresist;
developing means for developing the photoresist;
etching means for etching the photoresist and substrate to form a structure having a contour corresponding to the interference pattern; and
forming means for using the structure to form an antenna.
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Abstract
An antenna formation device/method has been developed to create variable shaped antennas using predetermined interference patterns to expose and develop a photoresist layer that is etched on a substrate to form the structure corresponding to the desired variable shaped antenna.
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Citations
1 Claim
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1. An antenna shaping device comprising:
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depositing means for depositing a photoresist layer on a substrate on a moveable support;
illuminating means for illuminating the photoresist with light intensity from plural sources producing a predetermined interference pattern thereon to expose said photoresist;
developing means for developing the photoresist;
etching means for etching the photoresist and substrate to form a structure having a contour corresponding to the interference pattern; and
forming means for using the structure to form an antenna.
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Specification