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Variable shape antenna etching system and antenna formed thereby

  • US 20050181614A1
  • Filed: 04/12/2005
  • Published: 08/18/2005
  • Est. Priority Date: 01/10/2002
  • Status: Abandoned Application
First Claim
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1. An antenna shaping device comprising:

  • depositing means for depositing a photoresist layer on a substrate on a moveable support;

    illuminating means for illuminating the photoresist with light intensity from plural sources producing a predetermined interference pattern thereon to expose said photoresist;

    developing means for developing the photoresist;

    etching means for etching the photoresist and substrate to form a structure having a contour corresponding to the interference pattern; and

    forming means for using the structure to form an antenna.

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