Shower plate having projections and plasma CVD apparatus using same
First Claim
Patent Images
1. A shower plate for plasma CVD comprising:
- a base surface having multiple apertures for passing a gas therethrough; and
multiple protrusions each separately protruding from the base surface and being dispersed among the apertures.
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Abstract
A shower plate 122 has protrusions 22 formed on the front face used with a first electrode in a plasma CVD apparatus. A plane-surface portion 23 is left around apertures of gas inlet holes 21 formed in the shower plate 122. With protrusions 22 being formed, a surface area of the first electrode is increased.
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Citations
17 Claims
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1. A shower plate for plasma CVD comprising:
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a base surface having multiple apertures for passing a gas therethrough; and
multiple protrusions each separately protruding from the base surface and being dispersed among the apertures. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 12, 14, 15)
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10. A shower plate for plasma CVD comprising:
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a base surface;
multiple protrusions protruding from the base surface, and multiple apertures for passing a gas therethrough dispersed on a front face constituted by the base surface and the protrusions, wherein a surface area of the base surface and the protrusions is greater by at least 40% than a calculated surface area of the base surface if no protrusions are provided, and wherein a surface area when extending from the base surface and the protrusions by a sheath generated by plasma exposure is nearly or substantially equal to or greater than the surface area of the base surface and the protrusions. - View Dependent Claims (11, 13, 16, 17)
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Specification