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Shower plate having projections and plasma CVD apparatus using same

  • US 20050183666A1
  • Filed: 02/18/2005
  • Published: 08/25/2005
  • Est. Priority Date: 02/20/2004
  • Status: Active Grant
First Claim
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1. A shower plate for plasma CVD comprising:

  • a base surface having multiple apertures for passing a gas therethrough; and

    multiple protrusions each separately protruding from the base surface and being dispersed among the apertures.

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