×

Patterned thin-film deposition using collimating heated masked assembly

  • US 20050183670A1
  • Filed: 05/03/2005
  • Published: 08/25/2005
  • Est. Priority Date: 09/24/2002
  • Status: Active Grant
First Claim
Patent Images

1. A scanning localized evaporation apparatus comprising:

  • (a) a base for supporting a substrate;

    (b) a mask assembly spaced above said base and comprising (c) an evaporant source spaced above said mask assembly;

    (d) means for heating said mask assembly; and

    (e) means for heating said evaporant source to evaporate the material into a stream which passes through said aligned openings of said mask assembly to deposit on the substrate.

View all claims
  • 0 Assignments
Timeline View
Assignment View
    ×
    ×