Probe tip processing
First Claim
Patent Images
1. A method, comprising:
- positioning a first probe tip of a first probe proximate a second probe tip of a second probe; and
heating at least one of the first and second probe tips such that a portion of probe material forming the at least one of the first and second probe tips dislodges to sharpen the at least one of the first and second probe tips.
4 Assignments
0 Petitions
Accused Products
Abstract
A method including positioning a first probe tip of a first probe proximate a second probe tip of a second probe and heating at least one of the first and second probe tips such that a portion of probe material forming the at least one of the first and second probe tips dislodges to sharpen the at least one of the first and second probe tips.
-
Citations
20 Claims
-
1. A method, comprising:
-
positioning a first probe tip of a first probe proximate a second probe tip of a second probe; and
heating at least one of the first and second probe tips such that a portion of probe material forming the at least one of the first and second probe tips dislodges to sharpen the at least one of the first and second probe tips. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15)
-
-
16. A method, comprising:
-
contacting a first probe tip of a first probe and a second probe tip of a second probe, wherein the first probe substantially comprises metal;
heating the first and second probe tips to an elevated temperature at which a portion of the metal dislodges from the first probe tip; and
maintaining the first and second probe tips at the elevated temperature for a period of time to sharpen the first probe tip. - View Dependent Claims (17)
-
-
18. An apparatus, comprising:
-
means for positioning a first probe tip of a first probe proximate a second probe tip of a second probe within a chamber of a charged particle beam device; and
means for heating at least one of the first and second probe tips such that a portion of probe material forming the at least one of the first and second probe tips dislodges to sharpen the at least one of the first and second probe tips. - View Dependent Claims (19, 20)
-
Specification