SYSTEM AND METHODS FOR HERMETIC SEALING OF POST MEDIA-FILLED MEMS PACKAGE
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Abstract
This invention provides a system and method for hermetically sealing a post media-filled package with a metal cap. The method can include the operation of filling a MEMS package through a fill port with at least one medium. A further operation can be plugging the fill port in the MEMS package with a sealant. Another operation can include depositing a metal cap over the sealant to hermetically seal the fill port.
26 Citations
34 Claims
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1-16. -16. (canceled)
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17. A micro-electro-mechanical system (MEMS) package for hermetically sealing a MEMS device, comprising:
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the MEMS package having a fill port, wherein the fill port is a through hole capable of having at least one medium inserted through the fill port;
at least one low temperature curing sealant placed within the fill port wherein the at least one low temperature curing sealant substantially fills the fill port; and
a metal cap placed over the at least one low temperature curing sealant in a specific pattern wherein the metal cap substantially hermetically seals the fill port. - View Dependent Claims (18, 19, 20, 21, 22, 23, 24, 25, 26, 27, 28, 29, 30, 31, 32, 33)
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34. A micro-electro-mechanical system (MEMS) package for hermetically sealing a MEMS device, comprising:
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a means for filling a MEMS package through a fill port with at least one medium;
a means for plugging the fill port in the MEMS package with at least one low temperature curing sealant; and
a means for hermetically sealing a metal cap in a specific pattern over the at least one low temperature curing sealant.
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Specification