Multi-function probe card

• US 20050184741A1
• Filed: 07/21/2004
• Published: 08/25/2005
• Est. Priority Date: 02/24/2004
• Status: Active Grant

• Current Assignee: Mpi Corporation
• Original Assignee: MJC Probe Incorporation
• Inventors: Yang, Hui-Pin, Sun, Horng-Chuan
• Granted Patent: US 6,984,998 B2
• Time in Patent Office: Days
• US Class Current: 324/754.70
• CPC Class Codes: G01R 31/2886 Features relating to contacting the IC under test, e.g. probe heads; chucks G01R31/2865 takes precedence, test connections, e.g. test sockets, or probes per se, G01R1/04 or G01R1/06
• CPC Class Codes: G01R 31/2891 related to sensing or controlling of force, position, temperature G01R31/2874 takes precedence; sensing of force G01L; sensing of position G01B, G01D; sensing of temperature G01K; controlling in general G05

Abstract

A multi-function probe card (40) includes a PCB (41), a plurality of probe needles (47), a counter (71) to acquire a “piece sequence parameter”, a signal-measuring device (72) via the probe needles (71) to acquire a current, and a voltage parameters etc. as well as a parametric processing system (74). The parametric processing system (74) includes an I/O unit (51)/(59), a processing unit (52), a time providing unit (55), a real time display unit (56), and a storing unit (57). Moreover, the piece sequence parameter, current parameter, and voltage parameter can be input into the processing unit (52) through the I/O unit (51)/(59). Thereafter, a parametric data structure can be set up to record and calculate in accordance with the datum and parameters, and finally to display service processes and conditions of the probe card (40) through the real time display unit (56).

Claims

1. A multi-function probe card, comprising:

a PCB (41);

a plurality of probe needles (47), an end of each of the probe needles (47) is connected to the PCB (41);

a counter (71), for detecting the probe needles (47) to count the piece of the DUT bare die (46) and generate a “

piece sequence parameter”

;

a signal-measuring device (72), for measuring the current and voltage passing through the probe needles (47) to generate current and voltage parameters; and

a parameter processing system (74), further comprising an I/O unit (51)/(59), a processing unit (52), a time providing unit (55), a real time display unit (56), and a storing unit (57);

whereby, the “

piece sequence parameter”

as well as the current and voltage parameters can be input into the processing unit (52) through the I/O unit (51)/(59);

the processing unit (52) employs the “

piece sequence parameter”

as a datum for piece of DUT while the “

time providing unit”

(55) provides processing unit (52) with a time datum for each of the DUT bare dies (46);

thereafter, the processing unit (52) sets up a parametric data structure in terms of the piece datum of the DUT bare die (46), current parameter, voltage parameter, and time datum for recording the service process and condition of the probe;

subsequently, the processing unit (52) real timely calculate the conditions of the probe card (40) and display the service process and conditions of the probe card (40).

2. The multi-function probe card as claimed in claim 1, wherein the counter (71) can measure the switching time slot interval of the current or voltage signals to generate the “

piece sequence parameter”

to fulfill the function of counting of the DUT bare die (46).

3. The multi-function probe card as claimed in claim 1, wherein the processing unit (52) can be selected from the group consisting of a microprocessor, a program-executing memory, and a data register memory, to fulfill the function for program execution and processing data register.

4. The multi-function probe card as claimed in claim 1, wherein the real time display unit (56) can be a visible device selected from the group consisting of an LCD (liquid crystal display), a seven-segment display, a CRT (cathode ray tube) display unit, a real time printing device, as well as a warning lamp &

a buzzer of a warning device, to fulfill the functions of displaying, warning, and monitoring the condition of the probe card.

5. The multi-function probe card as claimed in claim 1, wherein the storing unit (57) can be selected from the group consisting of a disk-recording device, a flash memory, and a portable memory card, to store the parametric data built up by the storing unit;

the storing unit (57) can also be a portable memory card selected from the group consisting of a CF Card (compact flash card) and SM card (smart media card).

6. A multi-function probe card, comprising:

a PCB (41);

a plurality of probe needles (47), an end of each of the probe needles (47) is connected to the PCB (41);

a counter (71), for detecting the probe needles (47) to count the piece of the DUT bare die (46) and generate a “

piece sequence parameter”

; and

a parameter processing system (74), further comprising an I/O unit (51)/(59), a processing unit (52), a time providing unit (55), a real time display unit (56), and a storing unit (57);

whereby, the “

piece sequence parameter”

as well as the current and voltage parameters can be input into the processing unit (52) through the I/O unit (51)/(59);

the processing unit (52) employs the “

piece sequence parameter”

as a datum for piece of DUT while the “

time providing unit”

(55) provides processing unit (52) with a time datum for each of the DUT bare dies (46);

thereafter, the processing unit (52) sets up a parametric data structure in terms of the piece datum of the DUT bare die (46), current parameter, voltage parameter, and time datum for recording the service process and condition of the probe;

subsequently, the processing unit (52) real timely calculate the conditions of the probe card (40) and display the service process and conditions of the probe card (40).

7. The multi-function probe card as claimed in claim 6, wherein the counter (71) can measure the switching time slot interval of the current or voltage signals to generate the “

piece sequence parameter”

to fulfill the function of counting of the DUT bare die (46).

8. The multi-function probe card as claimed in claim 6, wherein the processing unit (52) can be selected from the group consisting of a microprocessor, a program-executing memory, and a data register memory, to fulfill the function for program execution and processing data register.

9. The multi-function probe card as claimed in claim 6, wherein the real time display unit (56) can be a visible device selected from the group consisting of an LCD (liquid crystal display), a seven-segment display, a CRT (cathode ray tube) display unit, a real time printing device, as well as a warning lamp &

a buzzer of a warning device, to fulfill the functions of displaying, warning, and monitoring the condition of the probe card.

10. The multi-function probe card as claimed in claim 6, wherein the storing unit (57) can be selected from the group consisting of a disk-recording device, a flash memory, and a portable memory card, to store the parametric data built up by the storing unit;

the storing unit (57) can also be a portable memory card selected from the group consisting of a CF Card (compact flash card) and SM card (smart media card).