Stage apparatus and camera shake correction apparatus using the stage apparatus
First Claim
1. A stage apparatus comprising:
- a stationary support plate;
an X-direction moving member which is supported on the stationary support plate by an X-direction guide device so as to be move only in a specific X-direction; and
a Y-direction moving member which is supported on the X-direction moving member by a Y-direction guide device so as to be movable only in a Y-direction perpendicular to the X-direction and parallel with the support plate, wherein said X-direction guide device is provided with an X-direction elongated hole which extends in the X-direction and which is formed in one of said X-direction moving member and said stationary support plate, and an X-direction engagement projection which is provided on the other of said X-direction moving member and said stationary support plate and is engaged in said X-direction elongated hole so as to be movable only in the X-direction, and wherein said Y-direction guide device is provided with a Y-direction elongated hole which extends in the Y-direction and which is formed in one of said X-direction moving member and said Y-direction moving member, and a Y-direction engagement projection which is provided on the other of said X-direction moving member said Y-direction moving member and is engaged in said Y-direction elongated hole so as to be movable only in the Y-direction.
1 Assignment
0 Petitions
Accused Products
Abstract
A stage apparatus includes a stationary support plate; an X-direction moving member supported on the stationary support plate by an X-direction guide device; and a Y-direction moving member supported on the X-direction moving member by a Y-direction guide device. The X-direction guide device has an X-direction elongated hole extending in the X-direction and formed in one of the X-direction moving member and the stationary support plate, and an X-direction engagement projection provided on the other of the X-direction moving member and the stationary support plate and is engaged in the X-direction elongated hole. The Y-direction guide device has a Y-direction elongated hole extending in the Y-direction and formed in one of the X-direction and Y-direction moving members, and a Y-direction engagement projection which is provided on the other of the X-direction and Y-direction moving members and is engaged in the Y-direction elongated hole.
40 Citations
7 Claims
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1. A stage apparatus comprising:
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a stationary support plate;
an X-direction moving member which is supported on the stationary support plate by an X-direction guide device so as to be move only in a specific X-direction; and
a Y-direction moving member which is supported on the X-direction moving member by a Y-direction guide device so as to be movable only in a Y-direction perpendicular to the X-direction and parallel with the support plate, wherein said X-direction guide device is provided with an X-direction elongated hole which extends in the X-direction and which is formed in one of said X-direction moving member and said stationary support plate, and an X-direction engagement projection which is provided on the other of said X-direction moving member and said stationary support plate and is engaged in said X-direction elongated hole so as to be movable only in the X-direction, and wherein said Y-direction guide device is provided with a Y-direction elongated hole which extends in the Y-direction and which is formed in one of said X-direction moving member and said Y-direction moving member, and a Y-direction engagement projection which is provided on the other of said X-direction moving member said Y-direction moving member and is engaged in said Y-direction elongated hole so as to be movable only in the Y-direction. - View Dependent Claims (2, 3, 4, 5, 6, 7)
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Specification