Miniature silicon condenser microphone and method for producing the same
First Claim
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1. A silicon condenser microphone comprising:
- a transducer unit;
a substrate include a surface having a recess formed therein, the transducer unit attached to the surface of the substrate overlapping at least a portion of the recess to form a volume adjacent the transducer unit;
a cover placed over the transducer unit; and
an aperture formed in one of the cover or the substrate and acoustically coupled to the transducer unit.
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Abstract
A silicon condenser microphone package includes a transducer unit, a substrate, and a cover. The substrate includes an upper surface transducer unit is attached to the upper surface of the substrate and overlaps at least a portion of the recess wherein a back volume of the transducer unit is formed between the transducer unit and the substrate. The cover is placed over the transducer unit and either the cover or the substrate includes an aperture.
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Citations
17 Claims
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1. A silicon condenser microphone comprising:
- a transducer unit;
a substrate include a surface having a recess formed therein, the transducer unit attached to the surface of the substrate overlapping at least a portion of the recess to form a volume adjacent the transducer unit;
a cover placed over the transducer unit; and
an aperture formed in one of the cover or the substrate and acoustically coupled to the transducer unit. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17)
- a transducer unit;
Specification