Electro-optical device, method of manufacturing electro-optical device, and electronic apparatus
First Claim
1. A method of manufacturing an electro-optical device in which a plurality of substrates each having a plurality of pixel regions arranged in a matrix are arranged in a plane, each of the plurality of pixel regions including a pixel switching element and a self-emitting element, the method comprising:
- a step of forming small substrates each having the pixel switching elements and pixel electrodes of the self-emitting elements formed on one surface;
a step of bonding a large substrate to the other surfaces of a plurality of the small substrates arranged in a plane; and
a step of forming a light-emitting functional layer of the self-emitting element by selectively applying a liquid composition to a predetermined region of the one surface of each of the plurality of small substrates using an inkjet method.
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Accused Products
Abstract
To provide a manufacturing method of an electro-optical device capable of effectively forming self-emitting elements in a large substrate on which a plurality of small substrates are arranged in a plane, without increasing the size of a manufacturing apparatus, the electro-optical device manufactured by the method, and an electronic apparatus equipped with the same. When manufacturing an organic EL display device by bonding a plurality of small substrates, processes required for a laser annealing technique and a photolithography technique, such as a process of forming TFTs and a process of forming pixel electrode, are performed before a process of bonding the small substrates to the large substrate, and organic EL elements are formed by an inkjet method after the bonding process. Further, a protective film is formed on the small substrates while the organic EL display elements are being formed.
24 Citations
35 Claims
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1. A method of manufacturing an electro-optical device in which a plurality of substrates each having a plurality of pixel regions arranged in a matrix are arranged in a plane, each of the plurality of pixel regions including a pixel switching element and a self-emitting element,
the method comprising: -
a step of forming small substrates each having the pixel switching elements and pixel electrodes of the self-emitting elements formed on one surface;
a step of bonding a large substrate to the other surfaces of a plurality of the small substrates arranged in a plane; and
a step of forming a light-emitting functional layer of the self-emitting element by selectively applying a liquid composition to a predetermined region of the one surface of each of the plurality of small substrates using an inkjet method. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 24, 25, 26, 27, 28, 29, 30, 31, 32, 33, 34, 35)
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Specification