Method of controlling mover device, cooperative device of mover device, cooperative method of mover device, semiconductor manufacturing device, liquid crystal manufacturing device, and mechanical scan ion implantation device
First Claim
1. A method of controlling a mover device that includes:
- a fixed base;
a movable base that is moveable in a linear direction with respect to the fixed base;
a processing base that is movable in a linear direction with respect to the movable base, the linear direction being in parallel with the linear moving direction of the movable base; and
a moving force generating unit that is provided between the processing base and the movable base, and forms a main moving unit in cooperation with the processing base and the movable base, the method comprising the steps of;
generating a moving force from the moving force generating unit to move the processing base with respect to the movable base, thereby moving the processing base with respect to the fixed base as a result of the movement of the processing base with respect to the movable base;
moving the movable base on the fixed base in the opposite direction to the moving direction of the processing base by virtue of a reaction force caused by the moving force generated from the moving force generating unit to move the processing base, so that the movable base moves in the opposite direction to the moving direction of the processing base on the fixed base; and
controlling the moving velocity of the processing base with respect to the fixed base.
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0 Petitions
Accused Products
Abstract
A method of controlling a mover device that includes: a fixed base; a movable base that is moveable in a linear direction with respect to the fixed base; a processing base that is movable in a linear direction with respect to the movable base, the linear direction being in parallel with the linear moving direction of the movable base; and a moving force generating unit that is provided between the processing base and the movable base, and forms a main moving unit in cooperation with the processing base and the movable base, includes the steps of: generating a moving force from the moving force generating unit to move the processing base with respect to the movable base, thereby moving the processing base with respect to the fixed base as a result of the movement of the processing base with respect to the movable base; moving the movable base on the fixed base in the opposite direction to the moving direction of the processing base by virtue of a reaction force caused by the moving force generated from the moving force generating unit to move the processing base, so that the movable base moves in the opposite direction to the moving direction of the processing base on the fixed base; and controlling the moving velocity of the processing base with respect to the fixed base.
10 Citations
26 Claims
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1. A method of controlling a mover device that includes:
- a fixed base;
a movable base that is moveable in a linear direction with respect to the fixed base;
a processing base that is movable in a linear direction with respect to the movable base, the linear direction being in parallel with the linear moving direction of the movable base; and
a moving force generating unit that is provided between the processing base and the movable base, and forms a main moving unit in cooperation with the processing base and the movable base,the method comprising the steps of;
generating a moving force from the moving force generating unit to move the processing base with respect to the movable base, thereby moving the processing base with respect to the fixed base as a result of the movement of the processing base with respect to the movable base;
moving the movable base on the fixed base in the opposite direction to the moving direction of the processing base by virtue of a reaction force caused by the moving force generated from the moving force generating unit to move the processing base, so that the movable base moves in the opposite direction to the moving direction of the processing base on the fixed base; and
controlling the moving velocity of the processing base with respect to the fixed base. - View Dependent Claims (2, 3)
- a fixed base;
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4. A method of controlling a mover device that includes:
- a fixed base;
a movable base that is moveable in a linear direction with respect to the fixed base;
a processing base that is movable in a linear direction with respect to the movable base, the linear direction being in parallel with the linear moving direction of the movable base; and
a moving force generating unit that is provided between the processing base and the movable base, and forms a main moving unit in cooperation with the processing base and the movable base,the method comprising the steps of;
generating a moving force to accelerate and decelerate the processing base with respect to the movable base, so that the processing base is moved with respect to the movable base, and, as a result, the processing base is moved with respect to the fixed base;
moving the movable base on the fixed base in the opposite direction to the moving direction of the processing base by virtue of a reaction force caused by the moving force generated from the moving force generating unit to move the processing base;
converting the reaction force caused by the movement of the processing base into linear-direction inertial movements of the movable base, so that the processing base and the movable base linearly move with respect to each other;
controlling the moving velocity of the processing base and the movable base that interactively move on the fixed base in linear directions, wherein the linear-direction inertial movement of the movable base caused by the reaction force generated from the movement of the processing base includes accelerating or decelerating movements and a uniform velocity movement. - View Dependent Claims (5, 6, 7, 8, 9, 10, 22, 23)
- a fixed base;
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11. An cooperative method of a mover device that includes:
- a fixed base;
a movable base that is moved in a linear direction with respect to the fixed base by a second linear support guide;
a processing base that is moved in a linear direction with respect to the movable base by a first linear support guide, the linear direction being in parallel with the linear moving direction of the movable base;
a first precise relative position measuring unit that is provided between the processing base and the fixed base;
a second precise relative position measuring unit that is provided between the movable base and the fixed base; and
a moving force generating unit that is provided between the processing base and the movable base, and forms a main moving unit in cooperation with the processing base and the movable base;
the method comprising the steps of;
generating a moving force from the moving force generating unit to move the processing base with respect to the movable base, thereby moving the processing base with respect to the fixed base by virtue of a moving force acting in the opposite direction as a result of the movement of the processing base with respect to the movable base;
moving the movable base on the fixed base in the opposite direction to the moving direction of the processing base by virtue of a reaction force caused by the moving force generated from the moving force generating unit to move the processing base, so that the movable base moves in the opposite direction to the moving direction of the processing base on the fixed base; and
controlling the moving velocity of the processing base with respect to the fixed base, using a detection signal generated from the first precise relative position measuring unit;
wherein the mover device further includes a first belt connecting one end and the other end of the processing base, and a second belt connecting one end and the other end of the movable base;
the first and second belts are connected by pulley step parts for the processing base and the movable base, the pulley step parts including two-step pulleys provided one at each end part of the fixed base;
the pulley step parts are formed as pulley steps whose corresponding diameters for an inverse ratio of the ratio of masses of the processing base and the movable base; and
the first belt and the second belt wind around the pulley step parts in opposite directions.
- a fixed base;
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12. An cooperative device of a mover device that includes:
- a fixed base;
a movable base that is moved in a linear direction with respect to the fixed base by a second linear support guide;
a processing base that is moved in a linear direction with respect to the movable base by a first linear support guide, the linear direction being in parallel with the linear moving direction of the movable base;
a first precise relative position measuring unit that is provided between the processing base and the fixed base;
a second precise relative position measuring unit that is provided between the movable base and the fixed base; and
a moving force generating unit that is provided between the processing base and the movable base, and forms a main moving unit in cooperation with the processing base and the movable base;
wherein a moving force is generated from the moving force generating unit to move the processing base with respect to the movable base, thereby the processing base is moved with respect to the fixed base by virtue of a moving force acting in the opposite direction as a result of the movement of the processing base with respect to the movable base;
the movable base is moved on the fixed base in the opposite direction to the moving direction of the processing base by virtue of a reaction force caused by the moving force generated from the moving force generating unit to move the processing base, so that the movable base moves in the opposite direction to the moving direction of the processing base on the fixed base;
the moving velocity of the processing base with respect to the fixed base is controlled, using a detection signal generated from the first precise relative position measuring unit;
the mover device further includes a first belt connecting one end and the other end of the processing base, and a second belt connecting one end and the other end of the movable base;
the first and second belts are connected by pulley step parts for the processing base and the movable base, the pulley step parts including two-step pulleys provided one at each end part of the fixed base;
the pulley step parts are formed as pulley steps whose corresponding diameters form an inverse ratio of the ratio of masses of the processing base and the movable base; and
the first belt and the second belt wind around the pulley step parts in opposite directions. - View Dependent Claims (13, 14, 15, 16)
- a fixed base;
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17. A semiconductor manufacturing device having an cooperative device including a mover device that includes:
- a fixed base;
a movable base that is moved in a linear direction with respect to the fixed base by a second linear support guide;
a processing base that is moved in a linear direction with respect to the movable base by a first linear support guide, the linear direction being in parallel with the linear moving direction of the movable base;
a first precise relative position measuring unit that is provided between the processing base and the fixed base;
a second precise relative position measuring unit that is provided between the movable base and the fixed base; and
a moving force generating unit that is provided between the processing base and the movable base, and forms a main moving unit in cooperation with the processing base and the movable base;
wherein a moving force is generated from the moving force generating unit to move the processing base with respect to the movable base, thereby the processing base is moved with respect to the fixed base by virtue of a moving force acting in the opposite direction as a result of the movement of the processing base with respect to the movable base;
the movable base is moved on the fixed base in the opposite direction to the moving direction of the processing base by virtue of a reaction force caused by the moving force generated from the moving force generating unit to move the processing base, so that the movable base moves in the opposite direction to the moving direction of the processing base on the fixed base;
the moving velocity of the processing base with respect to the fixed base is controlled, using a detection signal generated from the first precise relative position measuring unit;
the mover device further includes a first belt connecting one end and the other end of the processing base, and a second belt connecting one end and the other end of the movable base;
the first and second belts are connected by pulley step parts for the processing base and the movable base, the pulley step parts including two-step pulleys provided one at each end part of the fixed base;
the pulley step parts are formed as pulley steps whose corresponding diameters form an inverse ratio of the ratio of masses of the processing base and the movable base; and
the first belt and the second belt wind around the pulley step parts in opposite directions. - View Dependent Claims (18)
- a fixed base;
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19. A liquid crystal device having an cooperative device including a mover device that includes:
- a fixed base;
a movable base that is moved in a linear direction with respect to the fixed base by a second linear support guide;
a processing base that is moved in a linear direction with respect to the movable base by a first linear support guide, the linear direction being in parallel with the linear moving direction of the movable base;
a first precise relative position measuring unit that is provided between the processing base and the fixed base;
a second precise relative position measuring unit that is provided between the movable base and the fixed base; and
a moving force generating unit that is provided between the processing base and the movable base, and forms a main moving unit in cooperation with the processing base and the movable base;
wherein a moving force is generated from the moving force generating unit to move the processing base with respect to the movable base, thereby the processing base is moved with respect to the fixed base by virtue of a moving force acting in the opposite direction as a result of the movement of the processing base with respect to the movable base;
the movable base is moved on the fixed base in the opposite direction to the moving direction of the processing base by virtue of a reaction force caused by the moving force generated from the moving force generating unit to move the processing base, so that the movable base moves in the opposite direction to the moving direction of the processing base on the fixed base;
the moving velocity of the processing base with respect to the fixed base is controlled, using a detection signal generated from the first precise relative position measuring unit;
the mover device further includes a first belt connecting one end and the other end of the processing base, and a second belt connecting one end and the other end of the movable base;
the first and second belts are connected by pulley step parts for the processing base and the movable base, the pulley step parts including two-step pulleys provided one at each end part of the fixed base;
the pulley step parts are formed as pulley steps whose corresponding diameters form an inverse ratio of the ratio of masses of the processing base and the movable base; and
the first belt and the second belt wind around the pulley step parts in opposite directions.
- a fixed base;
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20. A one-axis mechanical scan ion implantation device having an cooperative device including a mover device that includes:
- a fixed base;
a movable base that is moved in a linear direction with respect to the fixed base by a second linear support guide;
a processing base that is moved in a linear direction with respect to the movable base by a first linear support guide, the linear direction being in parallel with the linear moving direction of the movable base;
a first precise relative position measuring unit that is provided between the processing base and the fixed base;
a second precise relative position measuring unit that is provided between the movable base and the fixed base; and
a moving force generating unit that is provided between the processing base and the movable base, and forms a main moving unit in cooperation with the processing base and the movable base;
wherein a moving force is generated from the moving force generating unit to move the processing base with respect to the movable base, thereby the processing base is moved with respect to the fixed base by virtue of a moving force acting in the opposite direction as a result of the movement of the processing base with respect to the movable base;
the movable base is moved on the fixed base in the opposite direction to the moving direction of the processing base by virtue of a reaction force caused by the moving force generated from the moving force generating unit to move the processing base, so that the movable base moves in the opposite direction to the moving direction of the processing base on the fixed base;
the moving velocity of the processing base with respect to the fixed base is controlled, using a detection signal generated from the first precise relative position measuring unit;
the mover device further includes a first belt connecting one end and the other end of the processing base, and a second belt connecting one end and the other end of the movable base;
the first and second belts are connected by pulley step parts for the processing base and the movable base, the pulley step parts including two-step pulleys provided one at each end part of the fixed base, the pulley step parts are formed as pulley steps whose corresponding diameters form an inverse ratio of the ratio of masses of the processing base and the movable base, and the first belt and the second belt wind around the pulley step parts in opposite directions.
- a fixed base;
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21. A two-axis mechanical scan ion implantation device having an cooperative device including a mover device that includes:
- a fixed base;
a movable base that is moved in a linear direction with respect to the fixed base by a second linear support guide;
a processing base that is moved in a linear direction with respect to the movable base by a first linear support guide, the linear direction being in parallel with the linear moving direction of the movable base;
a first precise relative position measuring unit that is provided between the processing base and the fixed base;
a second precise relative position measuring unit that is provided between the movable base and the fixed base; and
a moving force generating unit that is provided between the processing base and the movable base, and forms a main moving unit in cooperation with the processing base and the movable base;
wherein a moving force is generated from the moving force generating unit to move the processing base with respect to the movable base, thereby the processing base is moved with respect to the fixed base by virtue of a moving force acting in the opposite direction as a result of the movement of the processing base with respect to the movable base;
the movable base is moved on the fixed base in the opposite direction to the moving direction of the processing base by virtue of a reaction force caused by the moving force generated from the moving force generating unit to move the processing base, so that the movable base moves in the opposite direction to the moving direction of the processing base on the fixed base;
the moving velocity of the processing base with respect to the fixed base is controlled, using a detection signal generated from the first precise relative position measuring unit;
the mover device further includes a first belt connecting one end and the other end of the processing base, and a second belt connecting one end and the other end of the movable base;
the first and second belts are connected by pulley step parts for the processing base and the movable base, the pulley step parts including two-step pulleys provided one at each end part of the fixed base, the pulley step parts are formed as pulley steps whose corresponding diameters form an inverse ratio of the ratio of masses of the processing base and the movable base, and the first belt and the second belt wind around the pulley step parts in opposite directions.
- a fixed base;
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24. A method of controlling a mover device that includes:
- a fixed base;
a movable base that is moved in a linear direction with respect to the fixed base by a second linear support guide;
a processing base that is moved in a linear direction with respect to the movable base by a first linear support guide, the linear direction being in parallel with the linear moving direction of the movable base;
a first precise relative position measuring unit that is provided between the processing base and the fixed base;
a second precise relative position measuring unit that is provided between the movable base and the fixed base; and
a moving force generating unit that is provided between the processing base and the movable base, and forms a main moving unit in cooperation with the processing base and the movable base;
the method comprising the steps of;
generating a moving force from the moving force generating unit to move the processing base with respect to the movable base, thereby moving the processing base with respect to the fixed base by virtue of a moving force acting in the opposite direction as a result of the movement of the processing base with respect to the movable base; and
moving the movable base on the fixed base in the opposite direction to the moving direction of the processing base by virtue of a reaction force caused by the moving force generated from the moving force generating unit to move the processing base, so that the movable base moves in the opposite direction to the moving direction of the processing base on the fixed base;
wherein the processing base with respect to the movable base is velocity-controlled by a detection signal of a third precise relative position measuring unit provided between the processing base and the movable base; and
a moving velocity of the processing base with respect to the fixed base in the uniform velocity region is correction-controlled by the first precise relative position measuring unit. - View Dependent Claims (25, 26)
- a fixed base;
Specification