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Miniature fluid-cooled heat sink with integral heater

  • US 20050189342A1
  • Filed: 02/23/2004
  • Published: 09/01/2005
  • Est. Priority Date: 02/23/2004
  • Status: Abandoned Application
First Claim
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1. A temperature control device comprising:

  • an interface surface configured to provide a thermal path to a device under test (“

    DUT”

    );

    a fluid-cooled heat sink having a first heat transfer portion in a first plane and a second heat transfer portion in a second plane, said first plane being closer to said interface surface than said second plane; and

    one or more integral heater assemblies.

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