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Micro-switching element fabrication method and micro-switching element

  • US 20050190023A1
  • Filed: 06/29/2004
  • Published: 09/01/2005
  • Est. Priority Date: 02/27/2004
  • Status: Active Grant
First Claim
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1. A method of making a micro-switching element, the switching element comprising:

  • a first substrate;

    a pair of supporting members spaced from each other and fixed to the substrate;

    a movable beam that includes a membrane bridging between the supporting members, a movable contact electrode disposed on the membrane and a movable driving electrode disposed on the membrane;

    a pair of stationary contact electrodes arranged to face the movable contact electrode; and

    a stationary driving electrode cooperating with the movable driving electrode for generation of electrostatic force;

    the method comprising;

    a sacrifice layer forming step for making a sacrifice layer on the substrate;

    a membrane forming step for making the membrane on the sacrifice layer; and

    a supporting member forming step for subjecting the sacrifice layer to etching with the membrane intervening, so that the supporting members are formed as remaining portions of the sacrifice layer between the substrate and the membrane.

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