Distributed bragg reflector for optoelectronic device
First Claim
1. A Distributed Bragg Reflector (DBR), comprising:
- one or more first DBR mirror layers, wherein each of the one or more first DBR mirror layers includes an oxidized region extending from an edge of the DBR to an oxide termination edge that is situated greater than a first distance from the edge of the DBR;
one or more second DBR mirror layers, wherein each of the one or more second DBR mirror layers includes an oxidized region extending from the edge of the DBR to an oxide termination edge that is situated less than a second distance from the edge of the DBR, wherein the first distance is greater than the second distance; and
at least a selected one of the first DBR mirror layers including an oxidizable material at a concentration that is above that of any of the one or more second DBR mirror layers, and wherein the selected one of the first DBR mirror layers is doped with an impurity at a higher level than at least some of the one or more second DBR mirror layers.
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Accused Products
Abstract
This disclosure concerns devices such as DBRs, one example of which includes at least one first mirror layers having an oxidized region extending from an edge of the DBR to an oxide termination edge that is situated greater than a first distance from the edge of the DBR. The DBR also includes at least one second mirror layer having an oxidized region extending from the edge of the DBR to an oxide termination edge that is situated less than a second distance from the edge of the DBR, such that the first distance is greater than the second distance. Additionally, a first mirror layer includes an oxidizable material at a concentration that is higher than the concentration of the oxidizable material in any of the second mirror layers. Finally, a first mirror layer is doped with an impurity at a higher level than one of the second mirror layers.
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Citations
21 Claims
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1. A Distributed Bragg Reflector (DBR), comprising:
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one or more first DBR mirror layers, wherein each of the one or more first DBR mirror layers includes an oxidized region extending from an edge of the DBR to an oxide termination edge that is situated greater than a first distance from the edge of the DBR;
one or more second DBR mirror layers, wherein each of the one or more second DBR mirror layers includes an oxidized region extending from the edge of the DBR to an oxide termination edge that is situated less than a second distance from the edge of the DBR, wherein the first distance is greater than the second distance; and
at least a selected one of the first DBR mirror layers including an oxidizable material at a concentration that is above that of any of the one or more second DBR mirror layers, and wherein the selected one of the first DBR mirror layers is doped with an impurity at a higher level than at least some of the one or more second DBR mirror layers. - View Dependent Claims (2, 3, 4, 5, 6, 7)
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8. A Distributed Bragg Reflector comprising:
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a first layer including an oxidizable material at a first concentration;
a second layer including an oxidizable material at a second concentration;
an oxide aperture forming layer including an oxidizable material at a third concentration, wherein the first concentration is less than the second concentration and the second concentration is less than the third concentration, and wherein said oxide aperture forming layer is disposed between said first layer and said second layer; and
a transition region disposed between said oxide aperture forming layer and said first layer, wherein said transition region includes an oxidizable material at a concentration that varies from a higher concentration near said oxide aperture forming layer to a lower concentration near said first layer. - View Dependent Claims (9, 10, 11, 12, 13, 14, 15, 16, 17, 18)
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19. A Distributed Bragg Reflector (DBR) having an edge, comprising:
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one or more first DBR mirror layers, wherein each of the one or more first DBR mirror layers includes an oxidized region extending from the edge of the DBR to an oxide termination edge that is situated greater than a first distance from the edge of the DBR;
one or more second DBR mirror layers, wherein each of the one or more second DBR mirror layers includes an oxidized region extending from the edge of the DBR to an oxide termination edge that is situated less than a second distance from the edge of the DBR, wherein the first distance is greater than the second distance;
an implant configured and arranged to aid control of one or more electrical artifacts related to the oxide termination edge of at least some of the one or more second DBR mirror layers; and
at least a selected one of the first DBR mirror layers including an oxidizable material at a concentration that is above that of any of the one or more second DBR mirror layers, wherein the selected one of the first DBR mirror layers is doped with an impurity at a higher level than any of the one or more second DBR mirror layers. - View Dependent Claims (20, 21)
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Specification