X-ray analysis apparatus

• US 20050190881A1
• Filed: 02/25/2005
• Published: 09/01/2005
• Est. Priority Date: 02/27/2004
• Status: Active Grant

• Current Assignee: Rigaku Corporation
• Original Assignee: Rigaku Corporation
• Inventors: Obata, Yasushi, Kakefuda, Kohji
• Granted Patent: US 7,206,378 B2
• Time in Patent Office: Days
• US Class Current: 378/87
• CPC Class Codes: G01N 23/20016 Goniometers

Abstract

An X-ray analysis apparatus includes: an X-ray radiation unit that irradiates a sample with X-ray; an X-ray detection unit that detects X-ray emission from the sample; a unit that allows the X-ray detection unit to perform scanning operation for changing the angle of the X-ray detection unit with respect to the sample; and an image controller that displays information related to X-ray intensity detected by the X-ray detection unit and information related to a scanning angle of the X-ray detection unit as a 3D image. The image controller displays the 3D image simultaneously with the scanning operation of the X-ray detection unit. Further, simultaneously with the scanning operation of the X-ray detection unit, two or all of 1D, 2D, and 3D images are displayed in one screen. A measurement result starts being displayed as a 3D image before information related to all measurement results has been obtained.

Claims

1. An X-ray analysis apparatus comprising:

X-ray radiation means for irradiating a sample with X-ray;

X-ray detecting means for detecting X-ray emission from the sample;

means for allowing the X-ray detecting means to perform scanning operation for changing the angle of the X-ray detecting means with respect to the sample; and

image control means for displaying information related to X-ray intensity detected by the X-ray detecting means and information related to a scanning angle of the X-ray detecting means as a 3D image, wherein

the image control means displays the 3D image simultaneously with the scanning operation of the X-ray detecting means.

2. The X-ray analysis apparatus according to claim 1, wherein

the X-ray detecting means has an X-ray detection region extending in the direction perpendicular to that of the scanning operation.

3. The X-ray analysis apparatus according to claim 2, wherein the 3D image is displayed on a 3-axis coordinate system with the diffraction angle on the horizontal axis, X-ray detection region perpendicular to the scanning operation direction of the X-ray detecting means on the depth axis, and the X-ray intensity on the vertical axis.

4. The X-ray analysis apparatus according to claim 1, wherein the image control means sequentially displays the 3D image in synchronization with the scanning operation of the X-ray detecting means in a stepwise manner.

5. The X-ray analysis apparatus according to claim 1, wherein the image control means sequentially displays the 3D image in synchronization with the scanning operation of the X-ray detecting means in a continuous fashion.

6. An X-ray analysis apparatus comprising:

X-ray radiation means for irradiating a sample with X-ray;

X-ray detecting means for detecting X-ray emission from the sample;

means for allowing the X-ray detecting means to perform scanning operation for changing the angle of the X-ray detecting means with respect to the sample; and

image control means for displaying information related to X-ray intensity detected by the X-ray detecting means and information related to a scanning angle of the X-ray detecting means simultaneously with the scanning operation of the X-ray detecting means using at least two image modes of 1D, 2D, and 3D images.

7. The X-ray analysis apparatus according to claim 6, wherein the X-ray detecting means has an X-ray detection region extending in the direction perpendicular to that of the scanning operation.

8. The X-ray analysis apparatus according to claim 6, wherein

the 1D image is represented, by a line, on a coordinate system with the diffraction angle on the horizontal axis and the X-ray intensity on the vertical axis,

the 2D image is represented, in a one-dimensional manner, on a coordinate system with the diffraction angle on the horizontal axis and X-ray detection region perpendicular to the scanning operation direction of the X-ray detecting means on the vertical axis, and

the 3D image is represented, in a perspective manner, on a 3-axis coordinate system with the diffraction angle on the horizontal axis, X-ray detection region perpendicular to the scanning operation direction of the X-ray detecting means on the depth axis, and the X-ray intensity on the vertical axis.

9. The X-ray analysis apparatus according to claim 6, wherein the image control means sequentially displays all the 1D, 2D, and 3D images or any combination among the three in synchronization with the scanning operation of the X-ray detecting means in a stepwise manner.

10. The X-ray analysis apparatus according to claim 6, wherein the image control means sequentially displays all the 1D, 2D, and 3D images or any combination among the three in synchronization with the scanning operation of the X-ray detecting means in a continuous fashion.