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X-ray analysis apparatus

  • US 20050190881A1
  • Filed: 02/25/2005
  • Published: 09/01/2005
  • Est. Priority Date: 02/27/2004
  • Status: Active Grant
First Claim
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1. An X-ray analysis apparatus comprising:

  • X-ray radiation means for irradiating a sample with X-ray;

    X-ray detecting means for detecting X-ray emission from the sample;

    means for allowing the X-ray detecting means to perform scanning operation for changing the angle of the X-ray detecting means with respect to the sample; and

    image control means for displaying information related to X-ray intensity detected by the X-ray detecting means and information related to a scanning angle of the X-ray detecting means as a 3D image, wherein the image control means displays the 3D image simultaneously with the scanning operation of the X-ray detecting means.

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