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Method of forming thin film pattern, method of manufacturing device, electro-optical apparatus and electronic apparatus

  • US 20050191781A1
  • Filed: 03/18/2004
  • Published: 09/01/2005
  • Est. Priority Date: 04/01/2003
  • Status: Active Grant
First Claim
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1. A method of forming a thin film pattern by placing a functional liquid on a substrate, comprising:

  • a bank formation step of forming banks in accordance with the thin film pattern on the substrate;

    a residue processing step of removing residue between the banks; and

    a material placement step of placing the functional liquid between the banks removed the residue.

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