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Piezoelectric cantilever pressure sensor

  • US 20050193822A1
  • Filed: 03/05/2004
  • Published: 09/08/2005
  • Est. Priority Date: 03/05/2004
  • Status: Active Grant
First Claim
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1. A piezoelectric cantilever pressure sensor, comprising:

  • a substrate; and

    an elongate piezoelectric cantilever mounted at one end on the substrate and extending over a cavity, the piezoelectric cantilever comprising;

    a first electrode;

    a second electrode; and

    a piezoelectric element between the first electrode and the second electrode and electrically connected thereto.

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