×

Window type probe, plasma monitoring device, and plasma processing device

  • US 20050194094A1
  • Filed: 03/28/2003
  • Published: 09/08/2005
  • Est. Priority Date: 04/24/2002
  • Status: Abandoned Application
First Claim
Patent Images

1. A detection port type probe characterized by comprising at least an electroconductive supporting member having an opening formed on at least a part of a surface thereof facing to plasma and a dielectric member having a probe electrode formed on one side thereof positioned at the opening of the electroconductive supporting member.

View all claims
  • 1 Assignment
Timeline View
Assignment View
    ×
    ×