Window type probe, plasma monitoring device, and plasma processing device
First Claim
1. A detection port type probe characterized by comprising at least an electroconductive supporting member having an opening formed on at least a part of a surface thereof facing to plasma and a dielectric member having a probe electrode formed on one side thereof positioned at the opening of the electroconductive supporting member.
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Accused Products
Abstract
This invention relates to a detection port type probe, a plasma monitoring device, and a plasma processing apparatus. It is intended to directly and conveniently detect a state of plasma generated by an application of a radio frequency or a high voltage, and the detection port type probe is provided with at least an electroconductive supporting member (5) having an opening formed on at least a part of a surface thereof facing to plasma and a dielectric member (1) having a probe electrode (2) formed on one side thereof positioned at the opening of the electroconductive supporting member (5).
122 Citations
10 Claims
- 1. A detection port type probe characterized by comprising at least an electroconductive supporting member having an opening formed on at least a part of a surface thereof facing to plasma and a dielectric member having a probe electrode formed on one side thereof positioned at the opening of the electroconductive supporting member.
Specification