MEMS flow module with filtration and pressure regulation capabilities
First Claim
1. A filter assembly, comprising:
- a first housing;
a second housing at least partially disposed within said first housing, wherein said second housing comprises a first flow path; and
a MEMS filter element mounted to said second housing such that all flow through said first flow path is directed through said MEMS filter element.
2 Assignments
0 Petitions
Accused Products
Abstract
Various embodiments of MEMS flow modules that both filter and regulate pressure are disclosed. One such MEMS flow module (58) has a tuning element (78) and a lower plate (70). A plurality of springs or spring-like structures (82) interconnect the tuning element (78) with the lower plate (70) in a manner that allows the tuning element (78) to move either toward or away from the lower plate (70), depending upon the pressure being exerted on the tuning element (78) by a flow through a lower flow port (74) on the lower plate (70). The tuning element (78) is disposed over this lower flow port (74) to induce a flow through the MEMS flow module (58) along a non-linear (geometrically) flow path. Preferably, a relatively small change in the pressure exerted by this flow on the tuning element (78) produces greater than a linear change in the flow rate out of the MEMS flow module (58).
54 Citations
60 Claims
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1. A filter assembly, comprising:
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a first housing;
a second housing at least partially disposed within said first housing, wherein said second housing comprises a first flow path; and
a MEMS filter element mounted to said second housing such that all flow through said first flow path is directed through said MEMS filter element. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13)
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14. A MEMS flow module, comprising:
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a first flow port; and
a tuning element movable along an axis that corresponds with a direction of a flow entering said MEMS flow module through said first flow port, wherein a position of said tuning element is dependent upon a pressure being exerted on said tuning element by said flow entering said MEMS flow module through said first flow port, and wherein a flow rate of said flow exiting said MEMS flow module is dependent upon a position of said tuning element. - View Dependent Claims (15, 16, 17, 18, 19, 20, 21, 22, 23, 24, 25, 26, 27, 28, 29, 30, 31, 32)
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33. A MEMS flow module, comprising:
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a first flow port;
a movable tuning element, wherein a position of said tuning element within said MEMS flow module is dependent upon a pressure being exerted on said tuning element by a flow entering said MEMS flow module through said first flow port, wherein a flow rate of said flow exiting said MEMS flow module is dependent upon a position of said tuning element within said MEMS flow module, and wherein said tuning element changes a direction of said flow entering said MEMS flow module through said first flow port before said flow exits said MEMS flow module. - View Dependent Claims (34, 35, 36, 37, 38, 39, 40, 41, 42, 43, 44, 45, 46, 47, 48, 49, 50, 51)
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52. A MEMS flow module, comprising:
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a housing comprising an at least substantially enclosed space, a first flow port, and a second flow port;
a first flow path through said housing, wherein said first and second flow ports are fluidly connected by said first flow path; and
a tuning element disposed within said enclosed space and movably interconnected with said housing, wherein a spacing between said tuning element and a portion of said housing defines a first flow channel of said first flow path, wherein a volume of said first flow channel is dependent upon a pressure being exerted on said tuning element by a flow entering said housing through said first port, wherein a flow rate of said flow exiting said enclosed space through said second port is dependent upon a position of said tuning element within said housing.
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53. A MEMS flow module, comprising:
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a first plate comprising a first flow port;
a tuning element movably suspended beyond said first plate and in overlying relation to said first flow port, wherein a spacing between said tuning element and said first plate defines a first flow channel, wherein a flow entering said MEMS flow module through said first flow port is forced by said tuning element to proceed through said first flow channel, and wherein a magnitude of said spacing between said tuning element and said first plate is variable and dependent upon a pressure being exerted on said tuning element by said flow entering said MEMS flow module through first flow port.
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54. A method for regulating a fluidic output from a first source, comprising the steps of:
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directing a fluid from said first source through a MEMS flow module and to a second source;
regulating a pressure of first source during said directing step, wherein said regulating step comprises providing greater than a proportional increase in a flow rate out of said MEMS flow module for an increase in a differential pressure across said MEMS flow module; and
filtering a continually open flow path through said MEMS flow module that is fluidly connected with said first source, wherein said filtering step comprises retaining a constituent within said MEMS flow module that enters said MEMS flow module from said second source, that is of at least a first size, and that is attempting to proceed along said flow path through said MEMS flow module and back to said first source. - View Dependent Claims (55, 56, 57, 58, 59, 60)
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Specification