Method of inspecting a semiconductor device and an apparatus thereof
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Abstract
A method of inspecting a sample in which the sample is inspected under a plurality of inspection conditions and inspection data obtained by inspecting the sample under each of the plurality of inspection conditions and position information on the sample of the inspection date in correspondence with the respective inspection conditions are stored. The inspection data for each of the plurality of inspection conditions is against each other by the use of the position information on the sample to determine a position to be inspected in detail, and an image of the sample at a position to be inspected in detail is obtained. The obtained image is classified, the inspection condition of the sample by the use of information of classification of the image is determined.
26 Citations
25 Claims
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1-12. -12. (canceled)
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13. A method of inspecting a specimen, comprising the steps of:
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determining an inspection condition by selecting among plural inspection conditions; and
inspecting a specimen processed in a process line under said determined inspection condition;
wherein the step of determining an inspection condition includes the following steps of;
inspecting a sample to detect defect candidates under plural inspection conditions by illuminating a light on the sample and detecting light from the sample which is illuminated by said illuminating light;
storing position information of defect candidates with an inspection condition thereof detected by the step of inspecting;
comparing said stored position information of defect candidates detected under said plural inspection conditions to judge an identity of said position information;
selecting defect candidates to be reviewed among said identity judged defect candidates;
reviewing said selected defect candidates and classifying said selected defect candidates; and
determining said inspection condition of the specimen by using the classified information of said selected defect candidates obtained at the step of reviewing. - View Dependent Claims (14, 15, 16)
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17. A method of inspecting a specimen, comprising the steps of:
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determining an inspection condition by selecting among plural inspection conditions; and
inspecting a specimen processed in a process line under said determined inspection condition, wherein the step of determining an inspection condition includes the following steps of;
inspecting a sample to detect defect candidates under plural inspection conditions by illuminating a light on the sample and detecting light from the sample illuminated by said illuminating light;
comparing position information of detected defect candidate under said plural inspection conditions to judge an identity of said position information;
displaying on a screen position information of said identity judged defect candidates;
selecting defect candidates to be reviewed among said identity judged defect candidates displayed on said screen;
obtaining review information of said identity judged defect candidates; and
determining said inspection condition of the specimen by using the review information of said selected defect candidates. - View Dependent Claims (18, 19, 20)
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21. An apparatus for inspecting a specimen, comprising:
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an inspection condition setting means which sets plural inspection conditions for inspecting a sample to detect defect candidates;
an inspection means which inspects a sample under plural inspection conditions set by said inspection condition setting means by illuminating a light on the sample and detecting light from the sample illuminated by the illuminating light;
storage means for storing position information of defect candidates with an inspection condition thereof detected by said inspection means under plural inspection conditions;
defect candidate identity judging means which judges identity of said defect candidates stored in said storage means by comparing said stored position information of said defect candidates detected under said plural inspection conditions;
display means which displays, on a screen, position information of said identity judged defect candidates judged by said defect candidate identity judging means;
selecting means for selecting defect candidates to be reviewed among said identity judged defect candidates displayed on said screen; and
an inspection condition input means for inputting an inspection condition of the sample by the use of information of said identity judged defect candidates selected by said selecting means. - View Dependent Claims (22, 23, 24, 25)
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Specification