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Vacuum pumping system, driving method thereof, apparatus having the same, and method of transferring substrate using the same

  • US 20050196254A1
  • Filed: 03/08/2005
  • Published: 09/08/2005
  • Est. Priority Date: 03/08/2004
  • Status: Active Grant
First Claim
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1. An apparatus, comprising:

  • a transfer unit under an atmospheric condition and having a robot therein; and

    at least one process chamber connected to one side of the transfer unit with a slot valve therebetween, and being alternately under a vacuum condition and under an atmospheric condition.

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