Method for forming pattern, thin film transistor, display device and method for manufacturing the same, and television apparatus

• US 20050196710A1
• Filed: 02/18/2005
• Published: 09/08/2005
• Est. Priority Date: 03/04/2004
• Status: Abandoned Application

• Current Assignee: Semiconductor Energy Laboratory Co., Ltd.
• Original Assignee: Semiconductor Energy Laboratory Co., Ltd.
• Inventors: Shiroguchi, Hiroko
• Application Number:
  US11/060,699
• Publication Number:
  US 20050196710A1
• Time in Patent Office: Days
• US Class Current: 430/322
• CPC Class Codes: G03F 7/0007 Filters, e.g. additive colour filters; Components for display devices
• CPC Class Codes: G03F 7/0046 with perfluoro compounds, e.g. for dry lithography G03F7/0048 takes precedence
• CPC Class Codes: G03F 7/0755 Non-macromolecular compounds containing Si-O, Si-C or Si-N bonds G03F7/0752 takes precedence
• CPC Class Codes: G03F 7/105 having substances, e.g. indicators, for forming visible images
• CPC Class Codes: G03F 7/165 Monolayers, e.g. Langmuir-Blodgett
• CPC Class Codes: G03F 7/26 Processing photosensitive materials; Apparatus therefor G03F7/12 - G03F7/24 take precedence
• CPC Class Codes: H01L 27/1292 using liquid deposition, e.g. printing

Abstract

It is an object of the present invention to provide a display device in which a material usability is enhanced and which can be manufactured by simplifying the manufacturing process, and a manufacturing technique thereof. It is also an object of the invention to provide a technique in which a pattern of a wiring or the like constituting these display devices can be formed to have a desired shape with preferable controllability. A method for forming a pattern according to the invention comprising the steps of: forming a first region including a light-absorbing material; forming a second region by modifying a surface of the substrate by irradiating the substance with laser light having a wavelength which is absorbed by the light-absorbing material; and forming a pattern by discharging a compound including a pattern forming material to the second region.

Claims

1. A method for forming a pattern comprising:

forming a first region having a substance including a light-absorbing material;

forming a second region by modifying the surface of the first region by selectively irradiating the first region with laser light having a wavelength which is absorbed by the light-absorbing material; and

forming a pattern by discharging a compound including a pattern forming material to the second region.

2. The method according to claim 1, wherein the light-absorbing material is dissolved in the substance.

3. The method according to claim 1, wherein a pigment is used as the light-absorbing material and the pigment is dispersed in the substance.

4. The method according to claim 1, wherein the wavelength of the laser light is set at 532 nm, and rhodamine B, eosine Y, methyl orange, or rose bengal is used as the light-absorbing material.

5. The method according to claim 1, wherein the substance including the light-absorbing material includes a fluorocarbon chain.

6. The method according to claim 1, wherein a surface of the substance is modified so that the first region has higher wettablity than that of the second region with respect to the compound.

7. A method for forming a pattern comprising:

forming a first region having a substance including a light-absorbing material;

forming a second region by modifying the surface of the first region by selectively irradiating the first region with laser light having a wavelength which is absorbed by the light-absorbing material;

removing the light-absorbing material; and

forming a pattern by discharging a compound including a pattern forming material to the second region.

8. The method according to claim 7, wherein the light-absorbing material is dissolved in the substance.

9. The method according to claim 7, wherein a pigment is used as the light-absorbing material and the pigment is dispersed in the substance.

10. The method according to claim 7, wherein the wavelength of the laser light is set at 532 nm, and rhodamine B, eosine Y, methyl orange, or rose bengal is used as the light-absorbing material.

11. The method according to claim 7, wherein the substance including the light-absorbing material includes a fluorocarbon chain.

12. The method according to claim 7, wherein a surface of the substance is modified so that the first region has higher wettablity than that of the second region with respect to the compound.

13. A method for manufacturing a semiconductor device comprising:

forming a first region having a substance including a light-absorbing material;

forming a second region by modifying the surface of the first region by selectively irradiating the first region with laser light having a wavelength which is absorbed by the light-absorbing material; and

forming a pattern by discharging a compound including a pattern forming material to the second region.

14. The method according to claim 13, wherein a pigment is used as the light-absorbing material.

15. The method according to claim 13, wherein the substance including the light-absorbing material includes a fluorocarbon chain.

16. The method according to claim 13, wherein a surface of the substance is modified so that the first region has higher wettablity than that of the second region with respect to the compound.

17. The method according to claim 13, wherein the electrode layer is formed as a gate electrode layer.

18. A method for manufacturing a semiconductor device comprising:

forming a first region having a substance including a light-absorbing material;

forming a second region by modifying the surface of the first region by selectively irradiating the first region with laser light having a wavelength which is absorbed by the light-absorbing material;

removing the light-absorbing material; and

forming a pattern by discharging a compound including a pattern forming material to the second region.

19. The method according to claim 18, wherein a pigment is used as the light-absorbing material.

20. The method according to claim 18, wherein the substance including the light-absorbing material includes a fluorocarbon chain.

21. The method according to claim 18, wherein a surface of the substance is modified so that the first region has higher wettablity than that of the second region with respect to the compound.

22. The method according to claim 18, wherein the electrode layer is formed as a gate electrode layer.

23. A semiconductor device comprising:

at least one thin film transistor over a substrate, the thin film transistor comprising;

an electrode layer provided over an insulating surface having a first region and a second region,

wherein the first region and the second region comprise a substance including a light-absorbing material,

wherein the electrode layer is provided over the second region, and

wherein the second region has higher wettability than that of the first region with respect to the electrode layer.

24. The semiconductor device according to claim 23, wherein the light-absorbing material is a pigment.

25. A semiconductor device comprising:

at least one thin film transistor over a substrate,

the thin film transistor comprising;

an electrode layer provided over an insulating surface having a first region and a second region,

wherein the second region comprises a substance including a light-absorbing material,

wherein the electrode layer is provided over the second region, and

wherein the second region has higher wettability than that of the first region with respect to the electrode layer.

26. The semiconductor device according to claim 25, wherein the light-absorbing material is a pigment.

27. A television device comprising:

a display device, the display device comprising;

a thin film transistor comprising a gate electrode layer provided over an insulating surface having a first region and a second region,

wherein the first region and the second region comprise a substance including a light-absorbing material,

wherein the gate electrode layer is provided over the second region, and wherein the second region has higher wettability than that of the first region with respect to the gate electrode layer.

28. The television device according to claim 27, wherein the light-absorbing material is a pigment.

29. A television device comprising:

a display device, the display device comprising;

a thin film transistor comprising a gate electrode layer provided over an insulating surface having a first region and a second region,

wherein the second region comprises a substance including a light-absorbing material,

wherein the gate electrode layer is provided over the second region, and

wherein the second region has higher wettability than that of the first region with respect to the gate electrode layer.

30. The television device according to claim 29, wherein the light-absorbing material is a pigment.