Automatic alignment of integrated circuit and design layout of integrated circuit to more accurately assess the impact of anomalies

• US 20050198602A1
• Filed: 03/05/2004
• Published: 09/08/2005
• Est. Priority Date: 03/05/2004
• Status: Active Grant

• Current Assignee: 709 Patent, LLC
• Original Assignee: 709 Patent, LLC
• Inventors: Brankner, Keith John
• Granted Patent: US 7,194,709 B2
• Time in Patent Office: Days
• US Class Current: 382/151
• CPC Class Codes: G03F 7/7065 Defects, e.g. optical inspection of patterned layer for defects

Abstract

A method, computer program product and system for assessing the impact of anomalies in a physical device. An anomaly may be detected in an integrated circuit. Upon detecting an anomaly, an image of the anomaly may be captured. A design layout of the image may be obtained. The image coordinates of the detected anomaly may be transformed into a common reference system, such as the design layout. By using a common unit of reference instead of different reference systems, automatic coordination of the integrated circuit and the design layout may have to be performed once instead of multiple times for multiple tools. The image coordinates of the detected anomaly may be transformed to the coordinates of a common reference system by vectorizing the image, matching polygons in both the image and the design layout and aligning the image of the anomaly with the design layout of the image.

Claims

1. A method for assessing the impact of anomalies comprising the steps of:

retrieving an image of a physical device;

obtaining a design layout of said image; and

registering said image of said physical device and said design layout of said image in a common frame of reference, wherein said step of registering said image of said physical device and said design layout of said image in said common frame of reference comprises the steps of;

vectorizing said image of said physical device into closed polygons;

matching polygons in said image with polygons in said design layout; and

aligning said image with said design layout of said image using said matched polygons.

2. The method as recited in claim 1, wherein said step of registering said image of said physical device and said design layout of said image in said common frame of reference further comprises the step of:

segmenting said image into objects.

3. The method as recited in claim 2, wherein said step of registering said image of said physical device and said design layout of said image in said common frame of reference further comprises the step of:

defining a location of polygons in said image corresponding to polygons matched in said design layout of said image in terms of coordinates of said common frame of reference.

4. The method as recited in claim 3, wherein said image comprises an image of a first anomaly.

5. The method as recited in claim 4, wherein said step of registering said image of said physical device and said design layout of said image in said common frame of reference further comprises the steps of:

re-identifying a location of said first anomaly in said image; and

computing a coordinate transform to express said re-identified location of said first anomaly in said image in terms of coordinates of said common frame of reference.

6. The method as recited in claim 5 further comprising the step of:

mapping said coordinates of said common frame of reference of said first anomaly onto netlist traces.

7. The method as recited in claim 6 further comprising the steps of:

receiving values of one or more physical objects located in close proximity to said coordinates of said common frame of reference of said first anomaly; and

simulating said physical device using said received values and said netlist traces to assess said first anomaly.

8. The method as recited in claim 7 further comprising the step of:

generating a report, wherein said report comprises the results of said simulation.

9. The method as recited in claim 5 further comprising the step of:

determining if said first anomaly is located in an area of said physical device critical to its operation.

10. The method as recited in claim 9, wherein said step of determining if said first anomaly is located in said area of said physical device critical to its operation comprises the step of:

classifying said first anomaly by its relation to one of a three-dimensional volume and a two-dimensional area in close proximity to said coordinates of said common frame of reference.

11. The method as recited in claim 1, wherein said step of registering said image of said physical device and said design layout of said image in said common frame of reference further comprises the step of:

aligning a bit map representation of said image with said bit map representation of said design layout.

12. The method as recited in claim 1, wherein said step of registering said image of said physical device and said design layout of said image in said common frame of reference further comprises the step of:

aligning said image with said design layout of said image by identifying two or more landmarks in said physical device.

13. The method as recited in claim 12 further comprising the step of:

maintaining positional correspondence between said image of said physical device with said design layout after said landmarks in said physical device are identified.

14. The method as recited in claim 13 further comprising the step of:

detecting a first anomaly, wherein said first anomaly is detected by comparing a vector representation of a physical object in said physical device with a vector representation of a corresponding physical object in said design layout.

15. The method as recited in claim 14 further comprising the step of:

mapping said coordinates of said common frame of reference of said first anomaly onto netlist traces.

16. The method as recited in claim 15 further comprising the steps of:

receiving values of one or more physical objects located in close proximity to said coordinates of said common frame of reference of said first anomaly; and

simulating said physical device using said received values and said netlist traces to assess said first anomaly.

17. The method as recited in claim 16 further comprising the step of:

generating a report, wherein said report comprises the results of said simulation.

18. The method as recited in claim 14 further comprising the step of:

determining if said first anomaly is located in an area of said physical device critical to its operation.

19. The method as recited in claim 18, wherein said step of determining if said first anomaly is located in said area of said physical device critical to its operation comprises the step of:

classifying said first anomaly by its relation to one of a three-dimensional volume and a two-dimensional area in close proximity to said coordinates of said common frame of reference.

20. The method as recited in claim 1, wherein said image comprises a first anomaly, wherein said step of registering said image of said physical device and said design layout of said image in said common frame of reference further comprises the steps of:

computing an affine transformation between other images of said physical device and said design layout; and

applying said affine transformation to said coordinates of said first anomaly in said frame of reference of said physical device to generate said coordinates of said common frame of reference.

21. The method as recited in claim 1, wherein said physical device is an integrated circuit.

22. The method as recited in claim 1, wherein said physical device is a mechanical device.

23. The method as recited in claim 1, wherein said physical device is an optical device.

24. A computer program product embodied in a machine readable medium for assessing the impact of anomalies comprising the programming steps of:

retrieving an image of a physical device;

obtaining a design layout of said image; and

registering said image of said physical device and said design layout of said image in a common frame of reference, wherein said programming step of registering said image of said physical device and said design layout of said image in said common frame of reference comprises the programming steps of;

vectorizing said image of said physical device into closed polygons;

matching polygons in said image with polygons in said design layout; and

aligning said image with said design layout of said image using said matched polygons.

25. The computer program product as recited in claim 24, wherein said programming step of registering said image of said physical device and said design layout of said image in said common frame of reference further comprises the programming step of:

segmenting said image into objects.

26. The computer program product as recited in claim 25, wherein said programming step of registering said image of said physical device and said design layout of said image in said common frame of reference further comprises the programming step of:

defining a location of polygons in said image corresponding to polygons matched in said design layout of said image in terms of coordinates of said common frame of reference.

27. The computer program product as recited in claim 26, wherein said image comprises an image of a first anomaly.

28. The computer program product as recited in claim 27, wherein said programming step of registering said image of said physical device and said design layout of said image in said common frame of reference further comprises the programming steps of:

re-identifying a location of said first anomaly in said image; and

computing a coordinate transform to express said re-identified location of said first anomaly in said image in terms of coordinates of said common frame of reference.

29. The computer program product as recited in claim 28 further comprising the programming step of:

mapping said coordinates of said common frame of reference of said first anomaly onto netlist traces.

30. The computer program product as recited in claim 29 further comprising the programming steps of:

receiving values of one or more physical objects located in close proximity to said coordinates of said common frame of reference of said first anomaly; and

simulating said physical device using said received values and said netlist traces to assess said first anomaly.

31. The computer program product as recited in claim 30 further comprising the programming step of:

generating a report, wherein said report comprises the results of said simulation.

32. The computer program product as recited in claim 28 further comprising the programming step of:

determining if said first anomaly is located in an area of said physical device critical to its operation.

33. The computer program product as recited in claim 32, wherein said programming step of determining if said first anomaly is located in said area of said physical device critical to its operation comprises the programming step of:

classifying said first anomaly by its relation to one of a three-dimensional volume and a two-dimensional area in close proximity to said coordinates of said common frame of reference.

34. The computer program product as recited in claim 24, wherein said programming step of registering said image of said physical device and said design layout of said image in said common frame of reference further comprises the programming step of:

aligning a bit map representation of said image with said bit map representation of said design layout.

35. The computer program product as recited in claim 24, wherein said programming step of registering said image of said physical device and said design layout of said image in said common frame of reference further comprises the programming step of:

aligning said image with said design layout of said image by identifying two or more landmarks in said physical device.

36. The computer program product as recited in claim 35 further comprising the programming step of:

maintaining positional correspondence between said image of said physical device with said design layout after said landmarks in said physical device are identified.

37. The computer program product as recited in claim 36 further comprising the programming step of:

detecting a first anomaly, wherein said first anomaly is detected by comparing a vector representation of a physical object in said physical device with a vector representation of a corresponding physical object in said design layout.

38. The computer program product as recited in claim 37 further comprising the programming step of:

mapping said coordinates of said common frame of reference of said first anomaly onto netlist traces.

39. The computer program product as recited in claim 38 further comprising the programming steps of:

receiving values of one or more physical objects located in close proximity to said coordinates of said common frame of reference of said first anomaly; and

simulating said physical device using said received values and said netlist traces to assess said first anomaly.

40. The computer program product as recited in claim 39 further comprising the programming step of:

generating a report, wherein said report comprises the results of said simulation.

41. The computer program product as recited in claim 37 further comprising the programming step of:

determining if said first anomaly is located in an area of said physical device critical to its operation.

42. The computer program product as recited in claim 41, wherein said step of determining if said first anomaly is located in said area of said physical device critical to its operation comprises the programming step of:

classifying said first anomaly by its relation to one of a three-dimensional volume and a two-dimensional area in close proximity to said coordinates of said common frame of reference.

43. The computer program product as recited in claim 24, wherein said image comprises a first anomaly, wherein said programming step of registering said image of said physical device and said design layout of said image in said common frame of reference further comprises the programming steps of:

computing an affine transformation between other images of said physical device and said design layout; and

applying said affine transformation to said coordinates of said first anomaly in said frame of reference of said physical device to generate said coordinates of said common frame of reference.

44. The computer program product as recited in claim 24, wherein said physical device is an integrated circuit.

45. The computer program product as recited in claim 24, wherein said physical device is a mechanical device.

46. The computer program product as recited in claim 24, wherein said physical device is an optical device.

47. A system, comprising:

a memory unit operable for storing a computer program for assessing the impact of anomalies; and

a processor coupled to said memory unit, wherein said processor, responsive to said computer program, comprises;

circuitry for retrieving an image of a physical device;

circuitry for obtaining a design layout of said image; and

circuitry for registering said image of said physical device and said design layout of said image in a common frame of reference, wherein said circuitry for registering said image of said physical device and said design layout of said image in said common frame of reference comprises;

circuitry for vectorizing said image of said physical device into closed polygons;

circuitry for matching polygons in said image with polygons in said design layout; and

circuitry for aligning said image with said design layout of said image using said matched polygons.

48. The system as recited in claim 47, wherein said circuitry for registering said image of said physical device and said design layout of said image in said common frame of reference further comprises:

circuitry for segmenting said image into objects.

49. The system as recited in claim 48, wherein said circuitry for registering said image of said physical device and said design layout of said image in said common frame of reference further comprises:

circuitry for defining a location of polygons in said image corresponding to polygons matched in said design layout of said image in terms of coordinates of said common frame of reference.

50. The system as recited in claim 49, wherein said image comprises an image of a first anomaly.

51. The system as recited in claim 50, wherein said circuitry for registering said image of said physical device and said design layout of said image in said common frame of reference further comprises:

circuitry for re-identifying a location of said first anomaly in said image; and

circuitry for computing a coordinate transform to express said re-identified location of said first anomaly in said image in terms of coordinates of said common frame of reference.

52. The system as recited in claim 51, wherein said processor further comprises:

circuitry for mapping said coordinates of said common frame of reference of said first anomaly onto netlist traces.

53. The system as recited in claim 52, wherein said processor further comprises:

circuitry for receiving values of one or more physical objects located in close proximity to said coordinates of said common frame of reference of said first anomaly; and

circuitry for simulating said physical device using said received values and said netlist traces to assess said first anomaly.

54. The system as recited in claim 53, wherein said processor further comprises:

circuitry for generating a report, wherein said report comprises the results of said simulation.

55. The system as recited in claim 51, wherein said processor further comprises:

circuitry for determining if said first anomaly is located in an area of said physical device critical to its operation.

56. The system as recited in claim 55, wherein said circuitry for determining if said first anomaly is located in said area of said physical device critical to its operation comprises:

circuitry for classifying said first anomaly by its relation to one of a three-dimensional volume and a two-dimensional area in close proximity to said coordinates of said common frame of reference.

57. The system as recited in claim 47, wherein said circuitry for registering said image of said physical device and said design layout of said image in said common frame of reference further comprises:

circuitry for aligning a bit map representation of said image with said bit map representation of said design layout.

58. The system as recited in claim 47, wherein said circuitry for registering said image of said physical device and said design layout of said image in said common frame of reference further comprises:

circuitry for aligning said image with said design layout of said image by identifying two or more landmarks in said physical device.

59. The system as recited in claim 58, wherein said processor further comprises:

circuitry for maintaining positional correspondence between said image of said physical device with said design layout after said landmarks in said physical device are identified.

60. The system as recited in claim 59, wherein said processor further comprises:

circuitry for detecting a first anomaly, wherein said first anomaly is detected by comparing a vector representation of a physical object in said physical device with a vector representation of a corresponding physical object in said design layout.

61. The system as recited in claim 60, wherein said processor further comprises:

circuitry for mapping said coordinates of said common frame of reference of said first anomaly onto netlist traces.

62. The system as recited in claim 61, wherein said processor further comprises:

circuitry for receiving values of one or more physical objects located in close proximity to said coordinates of said common frame of reference of said first anomaly; and

circuitry for simulating said physical device using said received values and said netlist traces to assess said first anomaly.

63. The system as recited in claim 62, wherein said processor further comprises:

circuitry for generating a report, wherein said report comprises the results of said simulation.

64. The system as recited in claim 60, wherein said processor further comprises:

circuitry for determining if said first anomaly is located in an area of said physical device critical to its operation.

65. The system as recited in claim 64, wherein said circuitry for determining if said first anomaly is located in said area of said physical device critical to its operation comprises:

circuitry for classifying said first anomaly by its relation to one of a three-dimensional volume and a two-dimensional area in close proximity to said coordinates of said common frame of reference.

66. The system as recited in claim 47, wherein said image comprises a first anomaly, wherein said circuitry for registering said image of said physical device and said design layout of said image in said common frame of reference further comprises:

circuitry for computing an affine transformation between other images of said physical device and said design layout; and

circuitry for applying said affine transformation to said coordinates of said first anomaly in said frame of reference of said physical device to generate said coordinates of said common frame of reference.

67. The system as recited in claim 47, wherein said physical device is an integrated circuit.

68. The system as recited in claim 47, wherein said physical device is a mechanical device.

69. The system as recited in claim 47, wherein said physical device is an optical device.