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Liquid cell and passivated probe for atomic force microscopy and chemical sensing

  • US 20050199047A1
  • Filed: 03/10/2004
  • Published: 09/15/2005
  • Est. Priority Date: 03/11/2003
  • Status: Active Grant
First Claim
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1. A liquid cell for an atomic force microscope, the liquid cell comprising:

  • a liquid cell housing, the liquid cell housing including an internal cavity to contain a fluid;

    a plurality of conductive feedthroughs traversing the liquid cell housing between the internal cavity and a dry side of the liquid cell;

    a cantilevered probe coupled to the liquid cell housing, wherein at least a portion of the cantilevered probe is located inside the internal cavity; and

    a piezoelectric drive element disposed on the cantilevered probe;

    wherein the cantilevered probe is actuated when a drive voltage is applied to the piezoelectric drive element through at least one of the conductive feedthroughs.

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