Nonresonant micromachined gyroscopes with structural mode-decoupling
First Claim
1. A 4-DOF nonresonant micromachined gyroscope comprising:
- a 2-DOF drive-mode oscillator; and
a 2-DOF sense-mode oscillator, where the drive-mode oscillator and sense-mode oscillators are mechanically decoupled and employ three interconnected proof masses.
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Abstract
A four-degrees-of-freedom (DOF) nonresonant micromachined gyroscope utilizes a dynamical amplification both in the 2-DOF drive-direction oscillator and the 2-DOF sense-direction oscillator, which are structurally decoupled, to achieve large oscillation amplitudes without resonance. The overall 4-DOF dynamical system is comprised of three proof masses. The second and third masses form the 2-DOF sense-direction oscillator. The first mass and the combination of the second and third masses form the 2-DOF drive-direction oscillator. The frequency responses of the drive and sense-mode oscillators have two resonant peaks and a flat region between the peaks. The device is nominally operated in the flat regions of the response curves belonging to the drive and sense-mode oscillators, where the gain is less sensitive to frequency fluctuations. This is achieved by designing the drive and sense anti-resonance frequencies to match.
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Citations
28 Claims
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1. A 4-DOF nonresonant micromachined gyroscope comprising:
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a 2-DOF drive-mode oscillator; and
a 2-DOF sense-mode oscillator, where the drive-mode oscillator and sense-mode oscillators are mechanically decoupled and employ three interconnected proof masses. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14)
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15. A method of operating a 4-DOF nonresonant micromachined gyroscope comprising:
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driving a 2-DOF drive-mode oscillator with an applied force;
driving a 2-DOF sense-mode oscillator with a Coriolis force derived from the 2-DOF drive-mode oscillator; and
mechanically decoupling the drive-mode oscillator and sense-mode oscillators. - View Dependent Claims (16, 17, 18, 19, 20, 21, 22, 23, 24, 25, 26, 27, 28)
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Specification