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Nonresonant micromachined gyroscopes with structural mode-decoupling

  • US 20050199061A1
  • Filed: 02/27/2004
  • Published: 09/15/2005
  • Est. Priority Date: 02/27/2004
  • Status: Active Grant
First Claim
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1. A 4-DOF nonresonant micromachined gyroscope comprising:

  • a 2-DOF drive-mode oscillator; and

    a 2-DOF sense-mode oscillator, where the drive-mode oscillator and sense-mode oscillators are mechanically decoupled and employ three interconnected proof masses.

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