Electrical shield structure for pressure sensor

• US 20050199070A1
• Filed: 03/08/2005
• Published: 09/15/2005
• Est. Priority Date: 03/12/2004
• Status: Active Grant

• Current Assignee: DENSO Corporation
• Original Assignee: DENSO Corporation
• Inventors: Koike, Haruhisa, Segawa, Nobuo, Baba, Hironobu
• Granted Patent: US 7,171,856 B2
• Time in Patent Office: Days
• US Class Current: 73/723
• CPC Class Codes: G01L 13/026 involving double diaphragm
• CPC Class Codes: G01L 19/0645 using isolation membranes, specially adapted for protection

Abstract

A pressure sensor includes a case having a concave portion, a sensing portion disposed in the concave portion to output an electrical signal proportional to an applied pressure, a circuit portion disposed in the concave portion and connected to the sensing portion and a conductive diaphragm fixed to the case to cover the concave portion. A conductive member surrounds the sensing portion and the circuit portion to provide an electrical shield. The diaphragm is used as a part of the conductive member.

Claims

1. A pressure sensor comprising:

a case having a concave portion;

a sensing portion disposed in the concave portion to output an electrical signal proportional to an applied pressure;

a circuit portion disposed in the concave portion and connected to the sensing portion; and

a conductive diaphragm fixed to the case to cover the concave portion,

wherein a conductive member surrounds the sensing portion and the circuit portion to provide an electrical shield, wherein the diaphragm is used as a part of the conductive member.

2. The pressure sensor of claim 1, wherein the conductive member comprises the diaphragm and a metal board fixed on the case.

3. The pressure sensor of claim 1, wherein the circuit portion includes a terminal disposed in the concave portion, wherein a first end of the terminal is exposed in the concave portion, wherein a wire electrically connects the sensing portion with the terminal.

4. The pressure sensor of claim 3, wherein the terminal has a second end that protrudes from the conductive member to provide an external electrical connection.