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Apparatus for the preparation of film

  • US 20050199182A1
  • Filed: 07/03/2003
  • Published: 09/15/2005
  • Est. Priority Date: 07/05/2002
  • Status: Active Grant
First Claim
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1. A film-forming apparatus, which comprises a gas-mixing chamber for admixing a raw gas and a reactive gas, a film-forming chamber connected to the gas-mixing chamber, a shower head disposed on the top face of the film-forming chamber and a stage arranged in the film-forming chamber for placing a substrate to be processed and capable of freely going up and down and in which a gas mixture prepared in the gas-mixing chamber is introduced into the film-forming chamber through the shower head to thus form a film on the substrate, the apparatus being characterized in that the gas mixture prepared in the gas-mixing chamber is supplied to the shower head through a supply port disposed at the peripheral portion on the bottom face of the gas-mixing chamber so that the gas mixture prepared in the gas-mixing chamber and fed to the shower head through the peripheral portion on the top face of the shower head flows towards the central portion of the shower head.

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