Apparatus for the preparation of film
First Claim
1. A film-forming apparatus, which comprises a gas-mixing chamber for admixing a raw gas and a reactive gas, a film-forming chamber connected to the gas-mixing chamber, a shower head disposed on the top face of the film-forming chamber and a stage arranged in the film-forming chamber for placing a substrate to be processed and capable of freely going up and down and in which a gas mixture prepared in the gas-mixing chamber is introduced into the film-forming chamber through the shower head to thus form a film on the substrate, the apparatus being characterized in that the gas mixture prepared in the gas-mixing chamber is supplied to the shower head through a supply port disposed at the peripheral portion on the bottom face of the gas-mixing chamber so that the gas mixture prepared in the gas-mixing chamber and fed to the shower head through the peripheral portion on the top face of the shower head flows towards the central portion of the shower head.
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Accused Products
Abstract
A thin film-forming apparatus, for ensuring uniform plane distribution of properties of a film formed on a substrate surface, has a gas-supply port 24a supplying a gas mixture from a gas-mixing chamber 24 to a shower head 25. The port is arranged at the peripheral portion on the bottom face of the gas-mixing chamber so that the gas mixture flows from the upper peripheral region of the head towards the center thereof. An exhaust port 32 discharging the exhaust gas generated in the film-forming chamber 3 is arranged at a position lower than the level of a stage 31 during film-formation directing the exhaust gas towards the side wall of the chamber 3 and discharging the exhaust gas through the exhaust port. The stage 31 is designed to move freely up and down to adjust the distance between the shower head 25 and substrate S.
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Citations
13 Claims
- 1. A film-forming apparatus, which comprises a gas-mixing chamber for admixing a raw gas and a reactive gas, a film-forming chamber connected to the gas-mixing chamber, a shower head disposed on the top face of the film-forming chamber and a stage arranged in the film-forming chamber for placing a substrate to be processed and capable of freely going up and down and in which a gas mixture prepared in the gas-mixing chamber is introduced into the film-forming chamber through the shower head to thus form a film on the substrate, the apparatus being characterized in that the gas mixture prepared in the gas-mixing chamber is supplied to the shower head through a supply port disposed at the peripheral portion on the bottom face of the gas-mixing chamber so that the gas mixture prepared in the gas-mixing chamber and fed to the shower head through the peripheral portion on the top face of the shower head flows towards the central portion of the shower head.
Specification