Convertible maintenance valve
First Claim
1. A vacuum treatment unit comprising:
- at least two adjacently disposed chamber areas being separated by at least one wall, the at least one wall having an opening therein for passage of substrates, the chamber areas being interconnected such that the opening may be closed by a valve unit for vacuum-tight separation of the chamber areas;
wherein said valve unit is separably attached inside said chamber.
3 Assignments
0 Petitions
Accused Products
Abstract
A vacuum treatment unit, especially for continuous coating of passing substrates, preferably a glass coating unit, with at least two, preferably various adjacently disposed chambers or chamber areas which by means of one or various chambers and/or separating walls are reciprocally separated and are interconnected through openings in said chamber and/or separating walls, preferably slotted locks for the passage of said substrates, and at least one opening may be closed in vacuum-tight fashion by means of a valve unit for vacuum-tight separation of chambers and/or chamber areas, and a valve unit is separably attached inside the chamber, especially on the inside of the chamber and/or separating wall.
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Citations
25 Claims
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1. A vacuum treatment unit comprising:
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at least two adjacently disposed chamber areas being separated by at least one wall, the at least one wall having an opening therein for passage of substrates, the chamber areas being interconnected such that the opening may be closed by a valve unit for vacuum-tight separation of the chamber areas;
wherein said valve unit is separably attached inside said chamber. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 24, 25)
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Specification