Convertible maintenance valve

• US 20050199185A1
• Filed: 03/15/2005
• Published: 09/15/2005
• Est. Priority Date: 03/15/2004
• Status: Abandoned Application

• Current Assignee: Applied Materials GmbH & Co., KG (Applied Materials Incorporated)
• Original Assignee: Applied Materials GmbH & Co., KG (Applied Materials Incorporated)
• Inventors: Richert, Holger, Hatten dorf, Guido, Sauer, Andreas
• Application Number:
  US11/080,082
• Publication Number:
  US 20050199185A1
• Time in Patent Office: Days
• US Class Current: 118/715
• CPC Class Codes: C03C 17/002 for flat glass, e.g. float glass
• CPC Class Codes: C23C 14/568 Transferring the substrates through a series of coating stations C23C14/562 takes precedence

Abstract

A vacuum treatment unit, especially for continuous coating of passing substrates, preferably a glass coating unit, with at least two, preferably various adjacently disposed chambers or chamber areas which by means of one or various chambers and/or separating walls are reciprocally separated and are interconnected through openings in said chamber and/or separating walls, preferably slotted locks for the passage of said substrates, and at least one opening may be closed in vacuum-tight fashion by means of a valve unit for vacuum-tight separation of chambers and/or chamber areas, and a valve unit is separably attached inside the chamber, especially on the inside of the chamber and/or separating wall.

Claims

1. A vacuum treatment unit comprising:

at least two adjacently disposed chamber areas being separated by at least one wall, the at least one wall having an opening therein for passage of substrates, the chamber areas being interconnected such that the opening may be closed by a valve unit for vacuum-tight separation of the chamber areas;

wherein said valve unit is separably attached inside said chamber.

2. The vacuum treatment unit of claim 1, wherein:

the chambers are for continuous coating of passing substrates.

3. The vacuum treatment unit of claim 2, wherein:

the chambers are for coating glass.

4. The vacuum treatment unit of claim 1, wherein:

the at least one wall includes slotted locks for passage of substrates.

5. The vacuum treatment unit of claim 1, wherein:

said valve unit is separably attached on an inside of the at least one wall.

6. The vacuum treatment unit of claim 1, wherein:

the valve unit is attached in such a way to the at least one wall such that attaching and/or removal may be carried out without essentially altering the at least one wall.

7. The vacuum treatment unit of claim 1, wherein:

the valve unit is on a first side of the at least one wall;

the chamber areas include internally disposed process tools and substrate transportation units on a second side of the at least one wall; and

disposition or removal of the valve unit from the at least one wall may be accomplished without altering the chamber areas and/or altering disposition of the process tools and/or the transportation units inside the chamber areas.

8. The vacuum treatment unit of claim 1, wherein:

disposition or removal of the valve unit from the at least one wall may be accomplished in both activated and deactivated operating conditions of the unit.

9. The vacuum treatment unit of claim 1, wherein:

the valve unit comprises a housing and a valve lid mobile inside the housing for providing a vacuum-tight closing of the opening; and

when the valid lid is in a closed position, the housing is vacuum-tight and separably attached at the at least one wall.

10. The vacuum treatment unit of claim 1, wherein:

the valve unit is separably attached to the at least one wall at the opening by a retainer.

11. The vacuum treatment unit of claim 10, wherein:

the retainer comprises a clamp that embraces the at least one wall in a vacuum-tight fashion alongside a circumferential section of the opening.

12. The vacuum treatment unit of claim 10, wherein:

the valve unit is attached in a vacuum-tight fashion on the retainer.

13. The vacuum treatment unit of claim 12, wherein:

the valve unit is separably attached to the retainer.

14. The vacuum treatment unit of claim 10, wherein:

the retainer comprises a first and a second step plate in two sections, each provided with a central slot-like opening, the first and second step plates each having two areas of different length and/or width which compose a step;

the first step plate engaging the valve unit;

the second step plate engaging the at least one wall;

the step plates being separably interconnected;

stop faces are provided between the valve unit and the first step plate, between the second step plate and the wall, and between the step plates; and

seals are integrated in the first and second step plates.

15. The vacuum treatment unit of claim 14, wherein:

the at least one wall includes a steplike recess on an inside surface into which said step plates penetrate.

16. The vacuum treatment unit of claim 14, wherein:

the first and second step plates and the at least one wall are connected by screwed connections.

17. The vacuum treatment unit of claim 1, wherein:

the valve unit is a slide valve.

18. The vacuum treatment unit of claim 1, wherein:

the valve unit is a flip valve.

19. The vacuum treatment unit of claim 1, wherein:

the valve unit is adapted to close the opening in both sealing directions and, thus, independent of an atmospheric and vacuum side.

20. The vacuum treatment unit of claim 1, wherein:

the valve unit includes a housing in two sections;

the sections are radially vacuum-tight interconnected to the opening;

the two sections include a guide slot;

further including a moveable flap movable in the guide slot;

the moveable flap configured to be displaced between a first position which closes the opening and a second position which opens the opening;

the two sections including at least one actuator adjacent the guide slot, the at least one actuator being configured to be forced against at least one sealing face of the movable flap.

21. The vacuum treatment unit of claim 20, wherein:

the at least one actuator comprises two actuators.

22. The vacuum treatment unit of claim 21, wherein:

the two actuators comprise a first actuator and a second actuator, the first actuator being configured to be forced against a first sealing face of the movable flap and the second actuator being configured to be forced against a second sealing face of the movable flap.

23. The vacuum treatment unit of claim 22, wherein:

the valve unit includes a first seal configured to engage the second sealing face of the movable flap when the first actuator is forced against the first sealing face of the movable flap; and

the valve unit includes a second seal configured to engage the first sealing face of the movable flap when the second actuator is forced against the second sealing face of the movable flap.

24. The vacuum treatment unit of claim 20, wherein:

the at least one actuator is operated by fluid pressure.

25. The vacuum treatment unit of claim 20, wherein:

the at least one actuator comprises an elastically moveable element.