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Apparatus for detecting a physical quantity acting as an external force and method for testing and manufacturing the apparatus

  • US 20050199434A1
  • Filed: 01/25/2005
  • Published: 09/15/2005
  • Est. Priority Date: 12/28/1989
  • Status: Active Grant
First Claim
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1. A method of testing an acceleration sensor, said acceleration sensor comprising:

  • a substrate arranged along a XY-plane of an XYZ three-dimensional coordinate system;

    a working body receiving a force and located adjacent to said substrate with a predetermined distance;

    a flexible member made of silicon supporting said working body at a periphery thereof so that said working body is suspended and spatial deviation of said working body is produced by applying said force thereto;

    a fixing member fixing said flexible member to said substrate; and

    a transducer for transforming said spatial deviation into an electric signal that indicates a direction and a magnitude of said force, said method comprising the steps of;

    causing spatial deviation of said working body in an X-axis direction of said XYZ three-dimensional coordinate system by applying Coulomb force;

    detecting an electric signal transformed by said transducer while said spatial deviation is caused by applying said Coulomb force; and

    testing an operation of said acceleration sensor with respect to said X-axis direction based on a relationship between said applied Coulomb force and said detected electric signal.

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