Method of manufacturing a spectral filter for green and longer wavelengths
First Claim
1. A method of making a spectral filter comprising:
- providing a substrate wafer of single-crystal (100)-oriented n-doped silicon having a first surface and a second surface, providing etching starting points at a first surface of said semiconductor wafer, electrochemically etching the substrate wafer beginning at said start points to produce a structured layer having pores with controlled depths defined at least partially therethrough, said pores having coherently modulated cross-sections at least over the part of said depth, and depositing onto the pore walls at least one layer of substantially transparent material.
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Abstract
A method of manufacture for optical spectral filters with omnidirectional properties in the visible, near IR, mid IR and/or far IR (infrared) spectral ranges is based on the formation of large arrays of coherently modulated waveguides by electrochemical etching of a semiconductor wafer to form a pore array. Further processing of said porous semiconductor wafer optimizes the filtering properties of such a material. The method of filter manufacturing is large scale compatible and economically favorable. The resulting exemplary non-limiting illustrative filters are stable, do not degrade over time, do not exhibit material delamination problems and offer superior transmittance for use as bandpass, band blocking and narrow-bandpass filters. Such filters are useful for a wide variety of applications including but not limited to spectroscopy, optical communications, astronomy and sensing.
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Citations
34 Claims
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1. A method of making a spectral filter comprising:
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providing a substrate wafer of single-crystal (100)-oriented n-doped silicon having a first surface and a second surface, providing etching starting points at a first surface of said semiconductor wafer, electrochemically etching the substrate wafer beginning at said start points to produce a structured layer having pores with controlled depths defined at least partially therethrough, said pores having coherently modulated cross-sections at least over the part of said depth, and depositing onto the pore walls at least one layer of substantially transparent material. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 24, 25, 26, 27, 28, 29, 30, 31, 32, 33, 34)
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Specification