Vacuum gate valve
First Claim
Patent Images
1. A vacuum gate valve comprising:
- a valve housing with a wall having an opening and a valve seat surrounding the opening;
a valve plate in which a receptacle is formed and which has a sealing face for closing off the opening; and
a valve rod on which the valve plate is detachably mounted via a connecting segment of the valve rod engaging into the receptacle, and which via control organs is supported and adjustable in such a way that by moving the valve plate over the opening by essentially following the valve rod axis and by pressing the sealing face of the valve plate against the valve seat the opening can be closed off, where the receptacle and the connecting segment engaging into the receptacle comprise;
a radial bearing segment making possible an at least partial turning of the valve plate relative to the valve rod about the valve rod axis, so that the alignment of the valve plate about the valve rod axis will adapt to the valve seat, at least when the valve plate is pressed for a first time onto the valve seat, and a segment confining the turning angle which confines the turning made possible by the radial bearing segment to a defined angular range, so that, while the valve plate is moved over the opening, no contact will occur between the valve housing and the valve plate due to an excessive turning angle.
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Accused Products
Abstract
The invention provides a vacuum gate valve for closing off an opening. The vacuum gate valve can have a valve plate that can be turned so that the alignment of the valve plate will adapt to a valve seat when the valve plate is pressed against the valve seat.
24 Citations
24 Claims
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1. A vacuum gate valve comprising:
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a valve housing with a wall having an opening and a valve seat surrounding the opening;
a valve plate in which a receptacle is formed and which has a sealing face for closing off the opening; and
a valve rod on which the valve plate is detachably mounted via a connecting segment of the valve rod engaging into the receptacle, and which via control organs is supported and adjustable in such a way that by moving the valve plate over the opening by essentially following the valve rod axis and by pressing the sealing face of the valve plate against the valve seat the opening can be closed off, where the receptacle and the connecting segment engaging into the receptacle comprise;
a radial bearing segment making possible an at least partial turning of the valve plate relative to the valve rod about the valve rod axis, so that the alignment of the valve plate about the valve rod axis will adapt to the valve seat, at least when the valve plate is pressed for a first time onto the valve seat, and a segment confining the turning angle which confines the turning made possible by the radial bearing segment to a defined angular range, so that, while the valve plate is moved over the opening, no contact will occur between the valve housing and the valve plate due to an excessive turning angle. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9)
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10. A valve plate for a vacuum gate comprising:
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a sealing face having at least one sealing ring for closing off an opening in a wall of a valve housing; and
a receptacle formed laterally in the valve plate, relative to the sealing face, for detachably mounting the valve plate to a valve rod by engaging a connecting segment of the valve rod into the receptacle, the valve rod being supported and adjustable via control organs in such a way that by moving the valve plate over the opening, essentially along the valve rod axis, and pressing the valve plate with its sealing ring onto a valve seat surrounding the opening, the opening (3) can be closed off, where the receptacle comprises;
a radial bearing segment making possible an at least a partial turning of the valve plate relative to the valve rod about the valve rod axis, so that the alignment of valve plate about the valve rod axis will adapt to the valve seat, at least when the valve plate is pressed for a first time onto the valve seat; and
a segment confining the turning angle which confines the turning made possible by the radial bearing segment to a defined angular range, so that, while the valve plate is moved over the opening, no contact will occur between the valve housing and the valve plate due to an excessive turning angle. - View Dependent Claims (11, 12, 13, 14, 15, 16)
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17. A vacuum gate valve comprising:
a valve plate, having a sealing face, where the valve plate is operatively attached to at least one valve rod, where the valve plate can have a rotation about the at least one valve rod so that when the valve plate is pressed against a valve seat the valve plate can rotate to align with the valve seat, where the valve seat is attached to a valve housing. - View Dependent Claims (18, 19, 20, 21)
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22. A method of vacuum sealing an opening comprising:
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positioning a valve plate above an opening in a valve housing, where the valve plate is larger than the opening, where a valve seating on the valve housing surrounds the opening; and
pressing the valve plate to the valve seating, where the opening is closed and where during pressing the valve plate rotates in a first rotation direction to allow uniform sealing across the valve seating. - View Dependent Claims (23, 24)
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Specification