MANUFACTURING METHOD FOR TRANSPARENT AND CONDUCTIVE COATINGS

• US 20050199861A1
• Filed: 12/12/2001
• Published: 09/15/2005
• Est. Priority Date: 12/12/2001
• Status: Abandoned Application

• Current Assignee: L. W. Wu, Wen-Chiang Huang
• Original Assignee: L. W. Wu, Wen-Chiang Huang
• Inventors: Huang, Wen-Chiang, Wu, L. W.
• Application Number:
  US10/013,282
• Publication Number:
  US 20050199861A1
• Time in Patent Office: Days
• US Class Current: 252/518.1
• CPC Class Codes: C23C 14/0021 Reactive sputtering or evaporation
• CPC Class Codes: C23C 14/086 of zinc, germanium, cadmium, indium, tin, thallium or bismuth
• CPC Class Codes: C23C 14/325 Electric arc evaporation
• CPC Class Codes: C23C 14/56 Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
• CPC Class Codes: H01B 1/08 oxides

Abstract

A method for producing a transparent, electrically conductive coating onto a substrate. The method includes the steps of (a) providing an ionized arc nozzle which includes a consumable electrode, a non-consumable electrode, and a working gas flow to form an ionized arc between the two electrodes, wherein the consumable electrode provides a metal material vaporizable from the consumable electrode by the ionized arc; (b) operating the arc nozzle to heat and at least partially vaporize the metal material for providing a stream of nanometer-sized metal vapor clusters into a chamber in which the substrate is disposed; (c) introducing a stream of oxygen-containing gas into the chamber to impinge upon the stream of metal vapor clusters and exothermically react therewith to produce substantially nanometer-sized metal oxide clusters; and (d) directing the metal oxide clusters to deposit onto the substrate for forming the coating.

Claims

1. A method for producing an optically transparent and electrically conductive coating onto a solid substrate, said method comprising:

(a) providing an ionized arc nozzle means comprising a consumable electrode, a non-consumable electrode, and a working gas flow to form an ionized arc between said consumable electrode and said non-consumable electrode, wherein said consumable electrode provides a metal material vaporizable therefrom by said ionized arc;

(b) operating said arc nozzle means to heat and at least partially vaporize said metal material for providing a stream of nanometer-sized vapor clusters of said metal material into a chamber in which said substrate is disposed;

(c) introducing a stream of oxygen-containing gas into said chamber to impinge upon said stream of metal vapor clusters and exothermically react therewith to produce substantially nanometer-sized metal oxide clusters; and

(d) directing said metal oxide clusters to deposit onto said substrate for forming said coating.

2. The method as set forth in claim 1, further comprising a step of operating at least a second ionized arc nozzle means for the purpose of completely vaporizing said metal material.

3. The method as set forth in claim 1, further comprising a step of operating a separate plasma arc means for vaporizing any un-vaporized metal oxide clusters after step (c) and before step (d).

4. The method as set forth in claim 1, 2, or 3, wherein said metal material comprises at least one metallic element selected from the low melting point group consisting of bismuth, cadmium, antimony, cesium, gallium, indium, lead, lithium, rubidium, tin, and zinc.

5. The method as set forth in claim 1, 2, or 3, wherein said metal material comprises indium and tin elements.

6. The method as set forth in claim 1, 2, or 3, wherein said stream of oxygen-containing gas further comprises a gas selected from the group consisting of argon, helium, hydrogen, carbon, nitrogen, chlorine, fluorine, boron, sulfur, phosphorus, selenium, tellurium, arsenic and combinations thereof.

7. The method as set forth in claim 1, 2, or 3, wherein said solid substrate comprises a train of individual pieces of glass or plastic being moved sequentially or concurrently into said chamber and then moved out of said chamber after said coating is formed.

8. The method as set forth in claim 1, 2, or 3, wherein said metal material comprises an alloy of at least two metallic elements.

9. The method as set forth in claim 1, 2, or 3, wherein said stream of oxygen-containing gas reacts with said metal vapor clusters in such a manner that the reaction heat released is used to sustain the reaction until most of said metal vapor clusters are substantially converted to nanometer-sized oxide clusters.

10. The method as set forth in claim 1, 2, or 3, wherein said stream of oxygen-containing gas is pre-heated to a predetermined temperature prior to being introduced to impinge upon said metal vapor clusters.

11. The method as defined in claim 1, 2, or 3 wherein said working gas is selected from the group consisting of nitrogen, hydrogen, noble gases and mixtures thereof.

12. The method as defined in claim 1, 2, or 3 wherein said working gas comprises dissociable inert gas for increasing the temperature gradient in said ionized arc.