Harmonic cMUT devices and fabrication methods
First Claim
1. A cMUT comprising:
- a membrane; and
a membrane frequency adjustor for adjusting a vibration mode of the membrane to a predetermined frequency.
1 Assignment
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Accused Products
Abstract
Harmonic capacitive micromachined ultrasonic transducer (“cMUT”) devices and fabrication methods are provided. In a preferred embodiment, a harmonic cMUT device generally comprises a membrane having a non-uniform mass distribution. A mass load positioned along the membrane can be utilized to alter the mass distribution of the membrane. The mass load can be a part of the membrane and formed of the same material or a different material as the membrane. The mass load can be positioned to correspond with a vibration mode of the membrane, and also to adjust or shift a vibration mode of the membrane. The mass load can also be positioned at predetermined locations along the membrane to control the harmonic vibrations of the membrane. A cMUT can also comprise a cavity defined by the membrane, a first electrode proximate the membrane, and a second electrode proximate a substrate. Other embodiments are also claimed and described.
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Citations
20 Claims
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1. A cMUT comprising:
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a membrane; and
a membrane frequency adjustor for adjusting a vibration mode of the membrane to a predetermined frequency. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10)
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11. A method of controlling vibration modes of a cMUT comprising the steps of:
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providing a membrane;
determining a target vibration frequency of the membrane; and
altering the mass distribution of the membrane along at least a portion of the length of the membrane to induce the target vibration frequency of the membrane. - View Dependent Claims (12, 13, 14, 15)
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16. A method of fabricating a cMUT comprising the steps of:
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providing a membrane; and
configuring the membrane to have a non-uniform mass distribution to receive energy at a predetermined frequency. - View Dependent Claims (17, 18, 19, 20)
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Specification