Method and device for vibration control

• US 20050200243A1
• Filed: 01/04/2005
• Published: 09/15/2005
• Est. Priority Date: 01/27/1994
• Status: Abandoned Application

• Current Assignee: Active Control eXperts, Inc. (ASML Holding NV)
• Original Assignee: Active Control eXperts, Inc. (ASML Holding NV)
• Inventors: Jacques, Robert, Spangler, Ronald, Marsh, Betsy, Pletner, Baruch, Bianchini, Emanuele
• Application Number:
  US11/028,686
• Publication Number:
  US 20050200243A1
• Time in Patent Office: Days
• US Class Current: 310/338
• CPC Class Codes: F16F 15/005 using electro- or magnetostrictive actuation means generating of mechanical vibrations operating with electrostriction B06B1/06, with magnetostriction B06B1/08; vehicle suspension arrangements characterised by use of piezoelectric elements B60G17/01941; piezoelectric, electrostrictive and magnetostrictive devices per se H10N30/00
• CPC Class Codes: F16F 15/02 Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems F16F15/005 takes precedence ; layered products B32B; suppression of vibration in ships B63; relieving load on bearings, using magnetic means F16C39/06
• CPC Class Codes: F16F 15/0275 Control of stiffness
• CPC Class Codes: F16F 2230/08 Sensor arrangement
• CPC Class Codes: G03F 7/70725 control
• CPC Class Codes: G03F 7/70825 Mounting of individual elements, e.g. mounts, holders or supports workpiece or mask holders G03F7/707
• CPC Class Codes: G03F 7/70833 Mounting of optical systems, e.g. mounting of illumination system, projection system or stage systems on base-plate or ground
• CPC Class Codes: G03F 7/709 Vibration, e.g. vibration detection, compensation, suppression or isolation
• CPC Class Codes: G05D 19/02 characterised by the use of electric means
• CPC Class Codes: H04R 17/08 signals being recorded or played back by vibration of a stylus in two orthogonal directions simultaneously
• CPC Class Codes: Y10T 29/42 Piezoelectric device making
• CPC Class Codes: Y10T 29/53039 with control means energized in response to activator stimulated by condition sensor
• CPC Class Codes: Y10T 29/53087 with signal, scale, illuminator, or optical viewer
• CPC Class Codes: Y10T 29/53091 for work-holder for assembly or disassembly
• CPC Class Codes: Y10T 29/5313 Means to assemble electrical device
• CPC Class Codes: Y10T 29/53178 Chip component
• CPC Class Codes: Y10T 29/53196 Means to apply magnetic force directly to position or hold work part

Abstract

A vibration control system comprising an actuator, and a sensor useful for controlling vibrations in systems for fabricating electronics equipment. The actuator may comprise one or more plates or elements of electro-active material bonded to an electroded sheet.

Claims

1-26. -26. (canceled)

27. A vibration control system for use in a fabricating system, said vibration control system comprising:

an actuator assembly for controlling vibration;

said actuator assembly comprising

(a) a strain element comprising a piezoelectric or electrorestrictive plate, shell, fiber or composite; and

(b) a conductor;

wherein said strain element and said conductor are mounted in a housing forming a protective body about the strain element, together forming a flexible actuator assembly; and

a circuit in electrical communication with said actuator assembly;

wherein said circuit signals said actuator assembly to control vibration of said fabricating system.

28. A vibration control system for use in a fabricating system, said vibration control system comprising:

an actuator assembly for controlling vibration;

said actuator assembly comprising

(a) a strain element comprising a piezoelectric or electrorestrictive plate, shell, fiber or composite; and

(b) a conductor;

wherein said strain element and said conductor are mounted in a housing forming a protective body about the strain element, together forming a flexible actuator assembly; and

a sensor for detecting at least one parameter of performance of said fabricating system and producing a signal in response thereto;

and a circuit in electrical communication with said actuator assembly and said sensor;

wherein, upon the detection of said at least one parameter of performance by said sensor, said sensor signals said circuit, which, in response, activates said actuator assembly to control vibration.

29. A vibration control system for use with a fabricating system having a support structure, said vibration control system comprising:

an actuator assembly for controlling vibration;

said actuator assembly comprising

(a) a strain element comprising a piezoelectric or electrorestrictive plate, shell, fiber or composite; and

(b) a conductor;

wherein said strain element and said conductor are mounted in a housing forming a protective body about the strain element, together forming a flexible actuator assembly; and

a sensor for detecting at least one parameter of displacement of said fabricating system and producing a signal in response thereto; and

a circuit in electrical communication with said actuator assembly and said sensor;

wherein, upon the detection of said at least one parameter of displacement by said sensor, said sensor signals said circuit, which, in response, activates said actuator assembly to control vibration in said support structure.

30. A fabricating system comprising:

an actuator assembly for controlling vibration;

said actuator assembly comprising

(a) a strain element comprising a piezoelectric or electrorestrictive plate, shell, fiber or composite; and

(b) a conductor;

wherein said strain element and said conductor are mounted in a housing forming a protective body about the strain element, together forming a flexible actuator assembly;

a sensor for detecting at least one parameter of displacement of said fabricating system and producing a signal in response thereto; and

a circuit in electrical communication with said actuator assembly and said sensor;

wherein, upon the detection of said at least one parameter of displacement by said sensor, said sensor signals said circuit, which, in response, activates said actuator assembly to control vibration.

31. A vibration control system for use with a fabricating system, said vibration control system comprising:

an actuator assembly for controlling vibration;

said actuator assembly comprising

(a) a strain element comprising a piezoelectric or electrorestrictive plate, shell, fiber or composite; and

(b) a conductor;

wherein said strain element and said conductor are mounted in a housing forming a protective body about the strain element, together forming a flexible actuator assembly comprising a thin sheet attached to a major face of the strain element;

a sensor for detecting at least one parameter of displacement of said fabricating system and producing a signal in response thereto; and

a circuit in electrical communication with said actuator assembly and said sensor;

wherein, upon the detection of said at least one parameter of displacement by said sensor, said sensor signals said circuit, which, in response, activates said actuator assembly to control vibration.

32. A vibration control system for use in a fabricating system, said vibration control system comprising:

an actuator assembly for controlling vibration;

said actuator assembly comprising

(a) a strain element comprising a piezoelectric or electrorestrictive plate, shell, fiber or composite; and

(b) a conductor;

wherein said strain element and said conductor are mounted in a housing forming a protective body about the strain element, together forming a flexible actuator assembly comprising a thin sheet attached to a major face of the strain element; and

a circuit in electrical communication with said actuator assembly;

wherein said circuit signals said actuator assembly to control vibration of said fabricating system.

33. A vibration control system for use in a fabricating system, said vibration control system comprising:

an actuator assembly for controlling vibration;

said actuator assembly comprising

(a) a strain element comprising a piezoelectric or electrorestrictive plate, shell, fiber or composite; and

(b) a conductor;

wherein said strain element and said conductor are mounted in a housing forming a protective body about the strain element, together forming a flexible actuator assembly comprising a thin sheet attached to a major face of the strain element; and

a sensor for detecting at least one parameter of performance of said fabricating system and producing a signal in response thereto;

and a circuit in electrical communication with said actuator assembly and said sensor;

wherein, upon the detection of said at least one parameter of performance by said sensor, said sensor signals said circuit, which, in response, activates said actuator assembly to control vibration.

34. A vibration control system for use with a fabricating system having a support structure, said vibration control system comprising:

an actuator assembly for controlling vibration;

said actuator assembly comprising

(a) a strain element comprising a piezoelectric or electrorestrictive plate, shell, fiber or composite; and

(b) a conductor;

wherein said strain element and said conductor are mounted in a housing forming a protective body about the strain element, together forming a flexible actuator assembly comprising a thin sheet attached to a major face of the strain element; and

a sensor for detecting at least one parameter of displacement of said fabricating system and producing a signal in response thereto; and

a circuit in electrical communication with said actuator assembly and said sensor;

wherein, upon the detection of said at least one parameter of displacement by said sensor, said sensor signals said circuit, which, in response, activates said actuator assembly to control vibration in said support structure.

35. A fabricating system comprising:

an actuator assembly for controlling vibration;

said actuator assembly comprising

(a) a strain element comprising a piezoelectric or electrorestrictive plate, shell, fiber or composite; and

(b) a conductor;

wherein said strain element and said conductor are mounted in a housing forming a protective body about the strain element, together forming a flexible actuator assembly comprising a thin sheet attached to a major face of the strain element; and

a sensor for detecting at least one parameter of displacement of said fabricating system and producing a signal in response thereto; and

a circuit in electrical communication with said actuator assembly and said sensor;

wherein, upon the detection of said at least one parameter of displacement by said sensor, said sensor signals said circuit, which, in response, activates said actuator assembly to control vibration.

36. A vibration control system for use with a fabricating system, said vibration control system comprising:

an actuator assembly for controlling vibration;

said actuator assembly comprising

(a) a strain element comprising a thin piezoelectric or electrorestrictive element having one or both of the length and width dimensions of the thin element at least tens of time greater than the thickness of the thin element; and

(b) a conductor;

wherein said strain element and said conductor are mounted in a housing forming a protective body about the strain element, together forming a flexible actuator assembly;

a sensor for detecting at least one parameter of displacement of said fabricating system and producing a signal in response thereto; and

a circuit in electrical communication with said actuator assembly and said sensor;

wherein, upon the detection of said at least one parameter of displacement by said sensor, said sensor signals said circuit, which, in response, activates said actuator assembly to control vibration.

37. A vibration control system for use in a fabricating system, said vibration control system comprising:

an actuator assembly for controlling vibration;

said actuator assembly comprising

(a) a strain element comprising a thin piezoelectric or electrorestrictive element having one or both of the length and width dimensions of the thin element at least tens of time greater than the thickness of the thin element; and

(b) a conductor;

wherein said strain element and said conductor are mounted in a housing forming a protective body about the strain element, together forming a flexible actuator assembly;

said actuator assembly comprising

(a) a strain element comprising a thin piezoelectric or electrorestrictive element having one or both of the length and width dimensions of the thin element at least tens of time greater than the thickness of the thin element; and

(b) a conductor;

wherein said strain element and said conductor are mounted in a housing forming a protective body about the strain element, together forming a flexible actuator assembly; and

a circuit in electrical communication with said actuator assembly;

wherein said circuit signals said actuator assembly to control vibration of said fabricating system.

38. A vibration control system for use in a fabricating system, said vibration control system comprising:

an actuator assembly for controlling vibration;

said actuator assembly comprising

(a) a strain element comprising a thin piezoelectric or electrorestrictive element having one or both of the length and width dimensions of the thin element at least tens of time greater than the thickness of the thin element; and

(b) a conductor;

wherein said strain element and said conductor are mounted in a housing forming a protective body about the strain element, together forming a flexible actuator assembly; and

a sensor for detecting at least one parameter of performance of said fabricating system and producing a signal in response thereto;

and a circuit in electrical communication with said actuator assembly and said sensor;

wherein, upon the detection of said at least one parameter of performance by said sensor, said sensor signals said circuit, which, in response, activates said actuator assembly to control vibration.

39. A vibration control system for use with a fabricating system having a support structure, said vibration control system comprising:

an actuator assembly for controlling vibration;

said actuator assembly comprising

(a) a strain element comprising a thin piezoelectric or electrorestrictive element having one or both of the length and width dimensions of the thin element at least tens of time greater than the thickness of the thin element; and

(b) a conductor;

wherein said strain element and said conductor are mounted in a housing forming a protective body about the strain element, together forming a flexible actuator assembly; and

a sensor for detecting at least one parameter of displacement of said fabricating system and producing a signal in response thereto; and

a circuit in electrical communication with said actuator assembly and said sensor;

wherein, upon the detection of said at least one parameter of displacement by said sensor, said sensor signals said circuit, which, in response, activates said actuator assembly to control vibration in said support structure.

40. A fabricating system comprising:

an actuator assembly for controlling vibration;

said actuator assembly comprising

(a) a strain element comprising a thin piezoelectric or electrorestrictive element having one or both of the length and width dimensions of the thin element at least tens of time greater than the thickness of the thin element; and

(b) a conductor;

wherein said strain element and said conductor are mounted in a housing forming a protective body about the strain element, together forming a flexible actuator assembly; and

a sensor for detecting at least one parameter of displacement of said fabricating system and producing a signal in response thereto; and

a circuit in electrical communication with said actuator assembly and said sensor;

wherein, upon the detection of said at least one parameter of displacement by said sensor, said sensor signals said circuit, which, in response, activates said actuator assembly to control vibration.