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Projection exposure apparatus, device manufacturing method, and sensor unit

  • US 20050200815A1
  • Filed: 02/08/2005
  • Published: 09/15/2005
  • Est. Priority Date: 02/09/2004
  • Status: Active Grant
First Claim
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1. A projection exposure apparatus which has a projection optical system and projects a pattern onto a substrate through said projection optical system, said apparatus comprising:

  • a sensor unit which comprises a light-receiving element for detecting light incident through said projection optical system, a vessel in which said light-receiving element is arranged, and a sealing window which transmits the incident light and seals said vessel, wherein a space between said sealing window and said light-receiving element is filled with a medium having a refractive index which is greater than 1.

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