MEMS device for an adaptive optics mirror
First Claim
1. A MEMS device, comprising:
- a first plate supported on a substrate and adapted to rotate with respect to the substrate about a rotation axis lying within a plane of the first plate; and
a movable electrode coupled to the first plate and located between the first plate and the substrate, wherein when the movable electrode moves with respect to the substrate, the first plate rotates about the rotation axis.
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Accused Products
Abstract
A MEMS device having a movable mirror pixel supported on a substrate and coupled to a motion actuator located between the mirror pixel and the substrate so as to enable rotation of the mirror pixel about an axis lying within the mirror plane. In one embodiment of the invention, the motion actuator has a movable electrode, on which the mirror pixel is mounted. The movable electrode is supported on the substrate by a pair of upright springs, each having two parallel segments joined at one end of the spring and disjoint at the other end. One disjoint segment end is coupled to the substrate, while the other disjoint segment end is coupled to the movable electrode. The end of the upright spring corresponding to the joined segment ends points away from the substrate such that (i) the spring body protrudes through a narrow slot in the mirror pixel and (ii) the mirror plane lies at about the mid-point of the spring. Advantageously, a mirror pixel of the invention enables implementation of a segmented mirror with tightly spaced mirror pixels providing a fill factor higher than about 98%.
21 Citations
31 Claims
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1. A MEMS device, comprising:
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a first plate supported on a substrate and adapted to rotate with respect to the substrate about a rotation axis lying within a plane of the first plate; and
a movable electrode coupled to the first plate and located between the first plate and the substrate, wherein when the movable electrode moves with respect to the substrate, the first plate rotates about the rotation axis. - View Dependent Claims (2, 3, 4, 5, 6, 7)
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8. A MEMS device, comprising:
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a rotatable mass suspended at a first offset distance from a substrate; and
an upright spring coupled between the rotatable mass and the substrate, wherein the upright spring enables rotation of said mass about a rotation axis offset from the substrate by a distance greater than the first offset distance. - View Dependent Claims (9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 24, 25, 26)
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27. A MEMS device, comprising an upright spring supported on a substrate, wherein:
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the upright spring comprises two segments joined at one end of the spring and disjoint at another end of the spring; and
one disjoint segment end is coupled to the substrate and the other disjoint segment end is adapted to move with respect to the substrate. - View Dependent Claims (28, 29, 30, 31)
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Specification