Method of manufacturing nitride based semiconductor light-emitting device
First Claim
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1. A method of manufacturing nitride based semiconductor light-emitting devices, comprising:
- forming of a first conductive type nitride based semiconductor layer, an active layer with a p-n junction, and a second conductive type nitride based semiconductor layer by turns on a substrate;
growing of island-like A1GaN film on said second conductive type nitride based semiconductor layer;
etching of a surface of said second conductive type nitride based semiconductor layer to make uneven portions on said surface thereof; and
forming of an ohmic electrode on said uneven portion of said surface of said second conductive type nitride based semiconductor layer.
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Abstract
Nitride based semiconductor light-emitting devices with a sufficiently low contact resistance p-type electrode and a method of manufacturing the same are disclosed. One such method of manufacturing nitride based semiconductor light-emitting devices includes steps of growing island-like AlGaN films 17 on p-type nitride based semiconductor layer 16, etching a surface of p-type type nitride based semiconductor layer 16 to make uneven portions 18 on its surface by using island-like AlGaN films 17 as a photomask, and forming of a p-type ohmic electrode on an electrode forming region of the uneven portion 18.
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18 Claims
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1. A method of manufacturing nitride based semiconductor light-emitting devices, comprising:
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forming of a first conductive type nitride based semiconductor layer, an active layer with a p-n junction, and a second conductive type nitride based semiconductor layer by turns on a substrate;
growing of island-like A1GaN film on said second conductive type nitride based semiconductor layer;
etching of a surface of said second conductive type nitride based semiconductor layer to make uneven portions on said surface thereof; and
forming of an ohmic electrode on said uneven portion of said surface of said second conductive type nitride based semiconductor layer. - View Dependent Claims (2, 3, 4, 5, 6, 12, 13, 14, 15, 16, 17, 18)
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7-11. -11. (canceled)
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