Sensor arrangement with improved spatial and temporal resolution

• US 20050202582A1
• Filed: 01/13/2005
• Published: 09/15/2005
• Est. Priority Date: 07/31/2002
• Status: Abandoned Application

• Current Assignee: Infineon Technologies AG
• Original Assignee: Infineon Technologies AG
• Inventors: Stohr, Annelie, Paulus, Christian, Stromberg, Guido, Eversmann, Bjorn-Oliver, Sturm, Thomas, Jenkner, Martin
• Application Number:
  US11/035,765
• Publication Number:
  US 20050202582A1
• Time in Patent Office: Days
• US Class Current: 438/48
• CPC Class Codes: G01N 33/4836 using multielectrode arrays
• CPC Class Codes: G01N 33/48728 Investigating individual cells, e.g. by patch clamp, voltage clamp investigating individual particles in general G01N15/10
• CPC Class Codes: H01L 21/00 Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Abstract

Sensor arrangement having sensor arrays arranged in crossover regions of row and column lines, each of the sensor arrays having a coupler and a sensor element, which influences current flow between a row and column line through the coupler, an accumulative current flow detector that detects accumulative current flow from individual electric current flows provided by the sensor arrays, and a decoder that determines a sensor element at which a sensor signal is present from the accumulative electric current flows. Accumulative current flows which satisfy a predetermined first criterion can be determined from the detected accumulative current flows, and from the accumulative current flows determined an accumulative current flow can be selected as an accumulative current flow which represents a sensor signal and which satisfies a predetermined second criterion, and the sensor element at which a sensor signal is present can be determined from the selected accumulative current flow.

Claims

1. A sensor arrangement comprising:

a plurality of row lines arranged in a first direction;

a plurality of column lines arranged in at least a second direction;

a plurality of sensor arrays arranged in crossover regions of the row lines and the column lines, each of the sensor arrays comprising;

at least one coupling device for electrically coupling a respective row line to a respective column line; and

a sensor element assigned to the at least one coupling device, the sensor element being set up such that the sensor element influences electric current flow between a respective row line and a respective column line through the respective at least one coupling device;

an accumulative current flow detector, which is electrically coupled to a respective end section of at least a portion of the row lines and of at least a portion of the column lines and serves for detecting a respective accumulative current flow from the individual electric current flows provided by the sensor arrays of the respective lines; and

a decoding device, which is coupled to the row lines and the column lines and is set up such that at least one sensor element at which a sensor signal is present can be determined from at least a portion of the accumulative electric current flows which can be fed to the decoding device via the row lines and the column lines,

wherein the decoding device is set up such that a plurality of accumulative current flows which satisfy a predetermined first selection criterion can be determined from the detected accumulative current flows, that from the accumulative current flows determined at least one accumulative current flow can be selected as an accumulative current flow which represents a sensor signal and which satisfies a predetermined second selection criterion, and that the sensor element at which a sensor signal is present can be determined from the selected accumulative current flow.

2. The sensor arrangement as claimed in claim 1, wherein the decoding device is set up such that the first selection criterion is that the amplitude of the accumulative current flow is greater than a first amplitude threshold value for a predetermined time duration.

3. The sensor arrangement as claimed in claim 1, wherein the decoding device is set up such that the first selection criterion is that the energy of the accumulative current flow is greater than an energy threshold value for a predetermined time duration.

4. The sensor arrangement as claimed in claim 1, wherein the decoding device is set up such that the first selection criterion is that the correlation of an accumulative current flow with respect to at least one other accumulative current flow is greater than a correlation threshold value for a predetermined time duration.

5. The sensor arrangement as claimed in claim 1, wherein the decoding device is set up such that the accumulative current flows determined are checked with regard to the second selection criterion in an order according to falling probability that that accumulative current flow represents a sensor signal.

6. The sensor arrangement as claimed in claim 1, wherein the decoding device is set up such that a sensor signal profile is determined with respect to the selected accumulative current flow.

7. The sensor arrangement as claimed in claim 6, wherein the decoding device is set up such that the sensor signal profile determined is subtracted from the signal profiles of the accumulative current flows determined, whereby updated accumulative current flows are formed, and that the selection of an accumulative current flow is effected using the updated accumulative current flows.

8. The sensor arrangement as claimed in claim 1, further comprising a voltage source, which is coupled to at least a portion of the row lines and of the column lines such that a predetermined potential difference is provided for at least a portion of the coupling devices.

9. The sensor arrangement as claimed in claim 1, wherein the at least one coupling device is a current source controlled by the associated sensor element or a resistor controlled by the associated sensor element.

10. The sensor arrangement as claimed in claim 1, wherein the at least one coupling device has a detection transistor having a first source/drain terminal coupled to one of the row lines, a second source/drain terminal coupled to one of the column lines, and a gate terminal coupled to the sensor element assigned to the coupling device.

11. The sensor arrangement as claimed in claim 1, wherein the at least one coupling device has a calibration device for calibrating the coupling device.

12. The sensor arrangement as claimed in claim 1, which is set up such that the at least one coupling device has a deactivation function.

13. The sensor arrangement as claimed in claim 11, wherein the calibration device has a calibration transistor having a first source/drain terminal coupled to the row line, a second source/drain terminal coupled to the gate terminal of the detection transistor and also to a capacitor coupled to the assigned sensor element, and a gate terminal coupled to a further column line, it being possible for an electrical calibration voltage to be applied to the gate terminal of the calibration transistor by means of the further column line.

14. The sensor arrangement as claimed in claim 13, wherein the at least one coupling device has an amplifier element for amplifying the individual electric current flow of the coupling device.

15. The sensor arrangement as claimed in claim 14, wherein the amplifier element has a bipolar transistor having a collector terminal coupled to the row line, an emitter terminal coupled to the column line, and a base terminal coupled to the second source/drain terminal of the detection transistor.

16. The sensor arrangement as claimed in claim 1, wherein at least a portion of the row lines and of the column lines have an amplifier device for amplifying the accumulative electric current flow flowing in the respective row lines and column lines.

17. The sensor arrangement as claimed in claim 1, wherein at least a portion of the row lines and/or of the column lines have a sample/hold device for storing the accumulative electric current flow flowing in the respective row line and/or column line at a predetermined instant.

18. The sensor arrangement as claimed in claim 1, wherein at least one sensor element is an ion-sensitive field-effect transistor (ISFET).

19. The sensor arrangement as claimed in claim 1, wherein at least one sensor element has a MOSFET.

20. The sensor arrangement as claimed in claim 1, wherein at least one sensor element is sensitive to electromagnetic radiation.

21. The sensor arrangement as claimed in claim 1, wherein the sensor arrays are formed essentially in rectangular fashion.

22. The sensor arrangement as claimed in claim 21, wherein the row lines form essentially a right angle with the column lines.

23. The sensor arrangement as claimed in claim 1, wherein the sensor arrays are formed essentially in honeycomb-shaped fashion.

24. The sensor arrangement as claimed in claim 23, wherein the row lines form an angle of 60°

with the column lines, and wherein different column lines are either parallel to one another or form an angle of 60°

with one another.

25. The sensor arrangement as claimed in claim 1, which is divided into at least two regions that can be operated independently of one another, the sensor arrangement being set up such that it is possible to predetermine which of the at least two regions are operated.