System and methods for hermetic sealing of post media-filled MEMS package
First Claim
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1. A method for hermetically sealing a post media-filled micro-electro-mechanical system (MEMS) package, comprising the steps of:
- filling a MEMS package through a fill port with at least one medium;
plugging the fill port in the MEMS package with a sealant; and
depositing a metal cap in a specific pattern over the sealant to hermetically seal the fill port.
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Abstract
This invention provides a system and method for hermetically sealing a post media-filled package with a metal cap. The method can include the operation of filling a MEMS package through a fill port with at least one medium. A further operation can be plugging the fill port in the MEMS package with a sealant. Another operation can include depositing a metal cap over the sealant to hermetically seal the fill port.
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Citations
17 Claims
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1. A method for hermetically sealing a post media-filled micro-electro-mechanical system (MEMS) package, comprising the steps of:
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filling a MEMS package through a fill port with at least one medium;
plugging the fill port in the MEMS package with a sealant; and
depositing a metal cap in a specific pattern over the sealant to hermetically seal the fill port. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16)
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17-34. -34. (canceled)
Specification