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System and methods for hermetic sealing of post media-filled MEMS package

  • US 20050202591A1
  • Filed: 05/11/2005
  • Published: 09/15/2005
  • Est. Priority Date: 02/19/2004
  • Status: Active Grant
First Claim
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1. A method for hermetically sealing a post media-filled micro-electro-mechanical system (MEMS) package, comprising the steps of:

  • filling a MEMS package through a fill port with at least one medium;

    plugging the fill port in the MEMS package with a sealant; and

    depositing a metal cap in a specific pattern over the sealant to hermetically seal the fill port.

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