Process and system for laser crystallization processing of film regions on a substrate to provide substantial uniformity, and a structure of such film regions
First Claim
28. A method for processing a thin film sample, comprising the steps of:
- (a) controlling a beam generator to emit at least one beam pulse;
(b) with the at least one beam pulse, irradiating at least one portion of the film sample with an intensity that is sufficient to fully melt at least one section of the film sample throughout its thickness, the at least one beam pulse having a predetermined shape;
(c) allowing the at least one portion of the film sample to re-solidify, the re-solidified at least one portion being composed of a first area and a second area, wherein the first area surrounds the second area, and wherein, upon the re-solidification thereof, the first area has large grains, and the second area has a small-grained region formed through nucleation;
(d) translating the thin film sample for a predetermined distance; and
(e) irradiating a further portion of the thin film using a further beam pulse, wherein the further portion is provided at a distance from the at least one portion that substantially corresponds to the predetermined distance, wherein steps (b) though (e) are provided to control a width of the first area, and wherein the second area has a cross-section to allow an active region of an electronic device to be facilitated thereon.
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Abstract
A process and system for processing a thin film sample (e.g., a semiconductor thin film), as well as the thin film structure are provided. In particular, a beam generator can be controlled to emit at least one beam pulse. With this beam pulse, at least one portion of the film sample is irradiated with sufficient intensity to fully melt such section of the sample throughout its thickness, and the beam pulse having a predetermined shape. This portion of the film sample is allowed to resolidify, and the re-solidified at least one portion is composed of a first area and a second area. Upon the re-solidification thereof, the first area includes large grains, and the second area has a region formed through nucleation. The first area surrounds the second area and has a grain structure which is different from a grain structure of the second area. The second area is configured to facilitate thereon an active region of an electronic device.
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Citations
104 Claims
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28. A method for processing a thin film sample, comprising the steps of:
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(a) controlling a beam generator to emit at least one beam pulse;
(b) with the at least one beam pulse, irradiating at least one portion of the film sample with an intensity that is sufficient to fully melt at least one section of the film sample throughout its thickness, the at least one beam pulse having a predetermined shape;
(c) allowing the at least one portion of the film sample to re-solidify, the re-solidified at least one portion being composed of a first area and a second area, wherein the first area surrounds the second area, and wherein, upon the re-solidification thereof, the first area has large grains, and the second area has a small-grained region formed through nucleation;
(d) translating the thin film sample for a predetermined distance; and
(e) irradiating a further portion of the thin film using a further beam pulse, wherein the further portion is provided at a distance from the at least one portion that substantially corresponds to the predetermined distance, wherein steps (b) though (e) are provided to control a width of the first area, and wherein the second area has a cross-section to allow an active region of an electronic device to be facilitated thereon. - View Dependent Claims (29, 30, 31, 32, 33, 34, 35, 36, 37, 38, 39, 40, 41, 42, 43, 44, 45, 46, 47, 48, 49, 50, 51)
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52. A system for processing a thin film sample, comprising:
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a processing arrangement which is configured to;
(a) control a beam generator to emit at least one beam pulse which is sufficient to fully melt at least one section of the film sample throughout its thickness, (b) control a translation stage such that at least one portion of the film sample is irradiated with the at least one beam pulse, the at least one beam pulse having a predetermined cross section, wherein the at least one portion of the film sample is allowed to re-solidify, the re-solidified at least one portion being composed of a first area and a second area, wherein, upon the re-solidification thereof, the first area has large grains, and the second area has a small-grained region formed through nucleation, wherein the first area surrounds the second area and has a grain structure which is different from a grain structure of the second area, and wherein the second area is configured to facilitate thereon an active region of an electronic device. - View Dependent Claims (53, 54, 55, 56, 57, 58, 59, 60, 61, 62, 63, 65, 66, 67, 68, 69, 70, 71, 72, 73, 74, 75, 76, 77)
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64-1. The system according to claim 78, wherein the electronic device is a thin film transistor.
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78. A system for processing a thin film sample, comprising:
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a processing arrangement which is configured to;
(a) control a beam generator to emit at least one beam pulse which has an intensity which is sufficient to fully melt at least one section of the film sample throughout its entire thiclness, (b) control a translation stage such that at least one portion of the film sample is irradiated with the at least one beam pulse, the at least one beam pulse having a predetermined cross section, wherein the at least one portion of the film sample is allowed to re-solidify, the re-solidified at least one position being composed of a first area and a second area, and wherein, upon the re-solidification thereof, the first area has large grains, and the second area has a small-grained region formed through nucleation, (c) control the translation stage to translate the thin film sample for a predetermined distance, and (d) control the laser beam generator to irradiate a further portion of the thin film using a further beam pulse, the further portion being provided at a distance from the at least one portion that substantially corresponds to the predetermined distance, wherein procedures (b) through (d) are provided to control a width of the first area, and wherein a width of the second area is configured to facilitate thereon an active region of an electronic device. - View Dependent Claims (1, 2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 24, 25, 26, 27, 64, 79, 80, 81, 82, 83, 84, 85, 86, 87, 88, 89, 91, 92, 93, 94, 95, 96, 97, 98, 99, 100, 101, 102)
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103. A thin film sample, comprising:
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at least one section irradiated by at least one beam pulse which fully melts the at least one section of the sample throughout its thickness, wherein the at least one portion of the film sample is re-solidified to include a first area and a second area, wherein, upon the re-solidification of the at least one section, the first area includes large grains, and the second area includes a region formed through nucleation, wherein the first area surrounds the second area and has a grain structure which is different from a grain structure of the second area, and wherein the second area is configured to facilitate thereon an active region of an electronic device.
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104. A thin film sample, comprising:
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a first area having large grains; and
a second area being surrounded by the first area and including a region formed through nucleation of at least one section of the thin film in which the second area is situated, wherein the first area has a grain structure which is different from a grain structure of the second area, and wherein the second area is configured to facilitate thereon an active region of an electronic device.
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Specification