Activity management system and method of using
First Claim
1. An activity management system for managing service activities relating to semiconductor manufacturing comprising:
- a data collection system configured to receive service activity data relating to at least one of a service component, a service operator, and a service account;
a data storage system coupled to said data collection system and configured to store said service activity data; and
a service action system coupled to said data collection system and said data storage system, and configured to provide service action data using said service activity data by performing at least two of a plurality of service functions comprising providing service component repair, providing service component start-up, providing service component preventative maintenance, providing service component cleaning, providing service component revisions, providing service component enhancements, providing service component de-installation, providing service education, and providing service collaboration.
3 Assignments
0 Petitions
Accused Products
Abstract
An activity management system, and a method of using thereof, is described for a service process in semiconductor manufacturing. The activity management system includes a data collection system configured to receive service activity data associated with at least one service component and a service operator, and relate the service activity data with at least one service account. Additionally, the activity management system includes a data storage system coupled to the data collection system and configured to store the service activity data. Furthermore, the activity management system includes a service action system coupled to the data collection system and the data storage system, and configured to perform at least one service function including service component repair, service component start-up, service component preventive maintenance, service component cleaning, service component revision (e.g., a field change notice), a service component enhancement (e.g., a continuous improvement notice), service component de-installation, a customer action plan, a project action plan, and service education.
48 Citations
38 Claims
-
1. An activity management system for managing service activities relating to semiconductor manufacturing comprising:
-
a data collection system configured to receive service activity data relating to at least one of a service component, a service operator, and a service account;
a data storage system coupled to said data collection system and configured to store said service activity data; and
a service action system coupled to said data collection system and said data storage system, and configured to provide service action data using said service activity data by performing at least two of a plurality of service functions comprising providing service component repair, providing service component start-up, providing service component preventative maintenance, providing service component cleaning, providing service component revisions, providing service component enhancements, providing service component de-installation, providing service education, and providing service collaboration. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20)
-
-
21. A method of using an activity management system to assist in performing a service action relating to semiconductor manufacturing comprising:
-
providing a data collection system configured to interact with a service operator and collect service activity data from said service operator, wherein said service activity data is associated with at least one of a service operator, a service component, and a service account;
providing a data storage system coupled to said data collection system, and configured to store said service activity data;
providing a service action system coupled to said data collection system and said data storage system, and configured to interact with said service operator to provide service action data to said service operator using said service activity data stored in said data storage system in order to perform at least two of a plurality of service functions comprising service component repair, providing service component start-up, providing service component preventative maintenance, providing service component cleaning, providing service component revisions, providing service component enhancements, providing service component de-installation, providing service education, and providing service collaboration; and
utilizing said service action data to perform a service action.
-
-
22. An activity management system for managing service activities relating to semiconductor manufacturing comprising:
-
a data collection system configured to collect service activity data relating to semiconductor manufacturing services;
a data storage system coupled to said data collection system and configured to store said service activity data; and
a service action system coupled to said data collection system and data storage system and configured to perform a service component service function and a non-service component service function in order to assist a service operator in performing a service action. - View Dependent Claims (23, 24, 25, 26, 27, 28, 29)
-
-
30. A method of using a computer system to manage service activities relating to semiconductor manufacturing comprising:
-
using said computer system to collect service activity data relating to semiconductor manufacturing services;
using said computer system to store said service activity data; and
using said computer system to perform a service component service function and a non-service component service function; and
performing a service action based on results of said service component or non-service component service function. - View Dependent Claims (31, 32, 33, 34, 35, 36, 37)
-
-
38. An activity management system for managing service activities relating to semiconductor manufacturing comprising:
-
means for collecting service activity data relating to semiconductor manufacturing services;
means for storing said service activity data coupled to said means for collecting; and
means, coupled to said means for collecting and said means for storing, for performing a service component service function and a non-service component service function in order to assist a service operator in performing a service action.
-
Specification