METHOD AND RELATED SYSTEM FOR SEMICONDUCTOR EQUIPMENT PREVENTION MAINTENANCE MANAGEMENT
First Claim
1. A method for prevention maintenance management of at least one piece of semiconductor equipment, each piece of equipment processing a plurality of semiconductor products according to at least one corresponding process parameter, the method comprising:
- recording each process parameter of each piece of equipment;
recoding processing conditions of each piece of equipment as at least one corresponding equipment parameter when each piece of equipment is processing;
evaluating and recording time and cost of prevention maintenance after each piece of equipment has run prevention maintenance, evaluating the quality of semiconductor products after each semiconductor product has been processed; and
analyzing a relationship between the corresponding process parameter, the equipment parameters, prevention maintenance cost, and the semiconductor product quality of each piece of equipment.
3 Assignments
0 Petitions
Accused Products
Abstract
A method and related system for semiconductor equipment prevention maintenance management. The method includes recording process parameters of each piece of equipment, recording equipment parameters when each piece of equipment is processing, evaluating and recording time and cost of prevention maintenance after each piece of equipment runs prevention maintenance, evaluating the quality of semiconductor products, and analyzing a relationship between the corresponding process parameter, the corresponding equipment parameters, prevention maintenance cost, and semiconductor products of each piece of equipment.
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Citations
18 Claims
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1. A method for prevention maintenance management of at least one piece of semiconductor equipment, each piece of equipment processing a plurality of semiconductor products according to at least one corresponding process parameter, the method comprising:
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recording each process parameter of each piece of equipment;
recoding processing conditions of each piece of equipment as at least one corresponding equipment parameter when each piece of equipment is processing;
evaluating and recording time and cost of prevention maintenance after each piece of equipment has run prevention maintenance, evaluating the quality of semiconductor products after each semiconductor product has been processed; and
analyzing a relationship between the corresponding process parameter, the equipment parameters, prevention maintenance cost, and the semiconductor product quality of each piece of equipment. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9)
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10. A system for prevention maintenance management of at least one piece of semiconductor equipment, each piece of equipment processing a plurality of semiconductor products according to at least one corresponding process parameter, the system comprising:
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a process interface module for recording each process parameter of each piece of equipment;
an equipment interface module for recoding processing conditions of each piece of equipment as at least one corresponding equipment parameter when each piece of equipment is processing;
a cost evaluation module for evaluating and recording time and cost of prevention maintenance after each piece of equipment has run prevention maintenance;
a quality monitor module for evaluating the quality of semiconductor products after each semiconductor product has been processed; and
an analysis core module for analyzing a relationship between the corresponding process parameter, the equipment parameters, prevention maintenance cost, and the semiconductor product quality of each piece of equipment. - View Dependent Claims (11, 12, 13, 14, 15, 16, 17, 18)
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Specification