Multilayer deposition multipixel image pickup device and television camera

• US 20050205958A1
• Filed: 03/18/2005
• Published: 09/22/2005
• Est. Priority Date: 03/19/2004
• Status: Active Grant

• Current Assignee: Fujifilm Corporation (Fujifilm Holdings Corporation)
• Original Assignee: Fuji Photo Film Co Limited (Fujifilm Holdings Corporation)
• Inventors: Taniguchi, Masato, Takada, Shunji
• Granted Patent: US 7,411,620 B2
• Time in Patent Office: Days
• US Class Current: 257/436
• CPC Class Codes: H01L 27/14621 Colour filter arrangements
• CPC Class Codes: H01L 27/14623 Optical shielding
• CPC Class Codes: H01L 27/14647 Multicolour imagers having a stacked pixel-element structure, e.g. npn, npnpn or MQW elements
• CPC Class Codes: H01L 27/148 Charge coupled imagers individual charge coupled devices H01L29/765

Abstract

A multilayer deposition multipixel image pickup device comprising a pixel unit, wherein the pixel unit comprises: a plurality of electromagnetic absorption layers being capable of absorbing electromagnetic waves of different wavelengths and performing photoelectric conversion; at least one pair of electrodes that sandwich each of electromagnetic absorption layers; a charge transfer and charge read part; and a plurality of contact parts that couple at least one of the electrodes and the charge transfer and charge read part, wherein a length between outermost surfaces of ones among electrodes of the pixel unit is smaller than a pixel size that is a circle-equivalent diameter of the same area as a first electromagnetic absorption layer of the electromagnetic absorption layers, the first electromagnetic absorption layer having a largest area in said plurality of electromagnetic absorption layers.

Claims

1. A multilayer deposition multipixel image pickup device comprising a pixel unit,

wherein the pixel unit comprises:

a plurality of electromagnetic absorption layers being capable of absorbing electromagnetic waves of different wavelengths and performing photoelectric conversion;

at least one pair of electrodes that sandwich each of electromagnetic absorption layers;

a charge transfer and charge read part; and

a plurality of contact parts that couple at least one of the electrodes and the charge transfer and charge read part,

wherein a length between outermost surfaces of ones among electrodes of the pixel unit is smaller than a pixel size that is a circle-equivalent diameter of the same area as a first electromagnetic absorption layer of the electromagnetic absorption layers, the first electromagnetic absorption layer having a largest area in said plurality of electromagnetic absorption layers.

2. The multilayer deposition multipixel image pickup device as claimed in claim 1,

wherein at least one of said plurality of electromagnetic absorption layers absorbs any of blue light, green light, red light, ultraviolet light, infrared light, X rays, and γ

rays and performs the photoelectric conversion.

3. The multilayer deposition multipixel image pickup device as claimed in claim 1, wherein said plurality of electromagnetic absorption layers have at least three electromagnetic absorption layers for absorbing 400-500 nm blue light, 500-600 nm green light, and 600-700 nm red light and performing the photoelectric conversion.

4. The multilayer deposition multipixel image pickup device as claimed in claim 1, wherein the charge transfer and charge read part is a semiconductor having charge mobility of 100 cm²/volt sec or more.

5. The multilayer deposition multipixel image pickup device as claimed in claim 1, wherein the charge transfer and charge read part has one of a CMOS structure and a CCD structure.

6. The multilayer deposition multipixel image pickup device as claimed in claim 1, wherein said plurality of contact parts comprise metal material.

7. The multilayer deposition multipixel image pickup device as claimed in claim 1, wherein said plurality of contact parts include at least three contact parts for coupling an electrode for taking out blue light and the charge transfer and charge read part, coupling an electrode for taking out green light and the charge transfer and charge read part, and coupling an electrode for taking out red light and the charge transfer and charge read part.

8. The multilayer deposition multipixel image pickup device as claimed in claim 1, wherein the pixel size is 2 to 20 μ

m.

9. The multilayer deposition multipixel image pickup device as claimed in claim 1, wherein the image pickup device comprises 1M to 100M pixels.

10. The multilayer deposition multipixel image pickup device as claimed in claim 1, wherein said plurality of electromagnetic absorption layers absorb 40% or more of incident visible light of 400 to 700 nm as a whole and the perform photoelectric conversion.

11. The multilayer deposition multipixel image pickup device as claimed in claim 1, wherein an electromagnetic absorption layer having the maximum open area ratio among said plurality of electromagnetic absorption layers has an open area ratio of 70% or more.

12. The multilayer deposition multipixel image pickup device as claimed in claim 1, wherein said plurality of electromagnetic absorption layers comprise four electromagnetic absorption layers for absorbing at least blue light, blue green light, green light, and red light.

13. The multilayer deposition multipixel image pickup device as claimed in claim 3, wherein at least one of the electromagnetic absorption layer for absorbing blue light, the electromagnetic absorption layer for absorbing green light, and the electromagnetic absorption layer for absorbing red light is comprises two or more electromagnetic absorption layers.

14. The multilayer deposition multipixel image pickup device as claimed in claim 1, wherein at least one of said plurality of electromagnetic absorption layers comprises an organic compound film.

15. The multilayer deposition multipixel image pickup device as claimed in claim 1, wherein at least one of said plurality of electromagnetic absorption layers comprises a plurality of organic compound films.

16. The multilayer deposition multipixel image pickup device as claimed in claim 1, wherein at least one of said plurality of electromagnetic absorption layers contains oxide or chalcogenide semiconductor and spectral sensitization coloring matter.

17. The multilayer deposition multipixel image pickup device as claimed in claim 1, wherein at least one of said plurality of electromagnetic absorption layers contains at least one of:

inorganic compound particles;

an inorganic compound thin film; and

a complex of the inorganic compound particles and the inorganic compound thin film.

18. A broadcasting television camera comprising an image pickup device as claimed in claim 1.

19. The broadcasting television camera as claimed in claim 18 comprising no optical low-pass filter.

20. The broadcasting television camera as claimed in claim 18, wherein the image pickup device can be changed.

21. The broadcasting television camera as claimed in claim 18, wherein the broadcasting television camera is used for high-definition broadcasting.