Microphone and method of producing a microphone
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Abstract
A microphone has a substrate including an acoustically transparent substrate region, a lid with an acoustically transparent lid region, and a membrane which is held by a membrane carrier between the lid and the substrate. The acoustically transparent substrate region or the acoustically transparent lid region is provided with at least one impedance hole sized so that an acoustic impedance of the impedance hole is larger than an acoustic impedance of the acoustically transparent region of the respective other region of substrate region and lid region.
176 Citations
37 Claims
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1-18. -18. (canceled)
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19. :
- A method for producing a microphone comprising the steps of;
providing a substrate comprising an acoustically transparent substrate region;
providing a lid comprising an acoustically transparent lid region;
attaching a membrane carrier to the substrate or the lid, which holds a membrane; and
mounting the lid on the substrate so that the lid and the substrate are mechanically connected, wherein the acoustically transparent substrate region or the acoustically transparent lid region comprises at least one impedance hole sized so that an acoustic impedance of the impedance hole is larger than an acoustic impedance of the acoustically transparent region of the other region of substrate region and lid region.
- A method for producing a microphone comprising the steps of;
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20. :
- A microphone comprising;
a substrate comprising an acoustically transparent substrate region;
a lid having an acoustically transparent lid region;
a membrane which is held by a membrane carrier between the lid and the substrate; and
at least one impedance hole formed in either the acoustically transparent substrate region or the acoustically transparent lid region, the at least one impedance hole sized so that the acoustic impedance of the impedance hole is larger than the acoustic impedance of the one of the acoustically transparent substrate region or the acoustically transparent lid region in which the impedance hole is not formed. - View Dependent Claims (21, 22, 23, 24, 25, 26, 27, 28, 29, 30, 31, 32, 33, 34, 35, 36, 37)
- A microphone comprising;
Specification