Flowmeter

• US 20050211000A1
• Filed: 03/09/2005
• Published: 09/29/2005
• Est. Priority Date: 03/24/2004
• Status: Abandoned Application

• Current Assignee: MKS Japan, Inc. (MKS Instruments Incorporated)
• Original Assignee: MKS Japan, Inc. (MKS Instruments Incorporated)
• Inventors: Suzuki, Isao
• Application Number:
  US11/074,838
• Publication Number:
  US 20050211000A1
• Time in Patent Office: Days
• US Class Current: 73/861.520
• CPC Class Codes: G01F 1/383 with electrical or electro-mechanical indication
• CPC Class Codes: G01F 1/42 Orifices or nozzles
• CPC Class Codes: G01L 9/0072 using variations in capacitance

Abstract

In a flowmeter of the present invention, there are provided a single differential pressure gauge using metal diaphragms, and an orifice member replaceable according to a range of a flow rate to be measured. The differential pressure gauge comprises a disk-like ceramic electrode having upper and lower electrode surfaces, and a pair of metal diaphragms disposed so as to face the ceramic electrode while being equally spaced from the electrode surfaces of the ceramic electrode. The differential pressure gauge is disposed in a fluid flow passage including the orifice member, in a manner such that fluid pressures on an upstream side and a downstream side of the orifice member act on respective fluid-exposed surfaces of the metal diaphragms. A differential pressure is detected from a change in capacitance between each diaphragm and the corresponding electrode surface of the ceramic electrode, to thereby determine a flow rate.

Claims

1. A flowmeter comprising:

a fluid flow passage including a flow inlet and a flow outlet;

an orifice member disposed in the fluid flow passage; and

a differential pressure gauge including two diaphragms, one of said two diaphragms being adapted to make contact with a fluid to be measured on an upstream side of the orifice member, and the other diaphragm being adapted to make contact with the fluid to be measured on a downstream side of the orifice member.

2. A flowmeter according to claim 1, wherein said two diaphragms are provided with means that allows a pressure acting on one of said diaphragms to be transmitted to the other diaphragm.

3. A flowmeter according to claim 2, wherein a part that makes contact with the fluid to be measured is at least partially formed from a fluoropolymer.

4. A flowmeter according to claim 3, wherein an output of the flowmeter is corrected, based on a signal of a fluid pressure.

5. A flowmeter according to claim 1, wherein:

said orifice member is detachable for replacement; and

a configuration of an orifice passage can be changed, according to a flow rate to be measured.

11. A flowmeter according to claim 2, wherein:

said orifice member is detachable for replacement; and

a configuration of an orifice passage can be changed, according to a flow rate to be measured.

12. A flowmeter according to claim 3, wherein:

said orifice member is detachable for replacement; and

a configuration of an orifice passage can be changed, according to a flow rate to be measured.

13. A flowmeter according to claim 4, wherein:

said orifice member is detachable for replacement; and

a configuration of an orifice passage can be changed, according to a flow rate to be measured.

6. A flowmeter comprising:

a fluid flow passage including a flow inlet and a flow outlet;

an orifice member disposed in the fluid flow passage; and

a differential pressure gauge including two diaphragms, one of said two diaphragms being adapted to make contact with a fluid to be measured on an upstream side of the orifice member, and the other diaphragm being adapted to make contact with the fluid to be measured on a downstream side of the orifice member,

wherein at least a part of each of said diaphragms is made of a metal, and two capacitors are formed by said diaphragms and a disk-like electrodes located near by said diaphragms, and wherein said two diaphragms are provided with means that allows a pressure acting on one of said diaphragms to be transmitted to the other diaphragm.

7. A flowmeter according to claim 6, wherein an output of the flowmeter is corrected, based on a signal of a fluid pressure.

8. A flowmeter according to claim 7, wherein said signal of the fluid pressure is detected, based on an algebraic sum of the capacitances of said two capacitors.

9. A flowmeter according to claim 6, wherein a part that makes contact with the fluid to be measured is at least partially formed from a fluoropolymer.

10. A flowmeter comprising:

a fluid flow passage including a flow inlet and a flow outlet;

an orifice member disposed in the fluid flow passage; and

a differential pressure gauge including two diaphragms, one of said two diaphragms being adapted to make contact with a fluid to be measured on an upstream side of the orifice member, and the other diaphragm being adapted to make contact with the fluid to be measured on a downstream side of the orifice member,

wherein at least a part of each of said diaphragms is made of a metal, and two capacitors are formed by said diaphragms and a disk-like electrodes located near by said diaphragms, and wherein a space between said two diaphragms is held under vacuum at a pressure of 1 Pa or less.