Spatial light modulator with robust mirror substrate condition
First Claim
1. A light modulator for modulating light incident thereon, the modulator including a substrate having a plurality of reflectivity enhancing layers formed thereon, said plurality of reflectivity enhancing layers comprising at least:
- a top surface for receiving light incident on the light modulator;
a first layer overlying the substrate;
a second layer between the top surface and the first layer, the second layer overlying and abutting the first layer; and
wherein the second layer has a predetermined thickness which depends upon a wavelength of the light in the second layer, and the predetermined thickness of the second layer is such that the light passing through the second layer and reflecting off an interface between the first and second layers constructively interferes with the light reflected from the top surface.
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Accused Products
Abstract
A light modulator and a method of manufacturing the same are provided having a substrate with reflectivity enhancing layers formed thereon. The layers include at least a top surface for receiving incident light, a first layer overlying the substrate, and a second layer between the top surface and the first layer, the second layer overlying and abutting the first layer. The second layer has a predetermined thickness selected in relation to an index of refraction of the second layer and to a wavelength of the incident light such that the light reflecting off an interface between the first and second layers constructively interferes with light reflected from the top surface. Preferably, the first layer also has a predetermined thickness selected such that the light reflecting off an interface between the first layer and the substrate constructively interferes with light reflected from the top surface.
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Citations
20 Claims
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1. A light modulator for modulating light incident thereon, the modulator including a substrate having a plurality of reflectivity enhancing layers formed thereon, said plurality of reflectivity enhancing layers comprising at least:
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a top surface for receiving light incident on the light modulator;
a first layer overlying the substrate;
a second layer between the top surface and the first layer, the second layer overlying and abutting the first layer; and
wherein the second layer has a predetermined thickness which depends upon a wavelength of the light in the second layer, and the predetermined thickness of the second layer is such that the light passing through the second layer and reflecting off an interface between the first and second layers constructively interferes with the light reflected from the top surface. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10)
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- 11. A light modulator for modulating light incident thereon, the modulator including a substrate having a plurality of reflectivity enhancing layers formed thereon, each of the plurality of reflectivity enhancing layers comprising refractive indices and thicknesses such that the light passing through at least one of the plurality of reflectivity enhancing layers and reflecting off an interface between a first layer and a second layer underlying and abutting the first layer, or off an interface between the first layer and the substrate, constructively interferes with light reflected from a top surface of the plurality of reflectivity enhancing layers.
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16. A method of manufacturing a light modulator having a substrate with a plurality of reflectivity enhancing layers formed thereon, the method comprising steps of:
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forming a first layer overlying the substrate; and
forming a second layer overlying and abutting the first layer, the second layer having a predetermined thickness in relation to an index of refraction of the second layer and to a wavelength of light incident on a top surface of the plurality of reflectivity enhancing layers such that light passing through the second layer and reflecting off an interface between the first and second layers constructively interferes with light reflected from the top surface. - View Dependent Claims (17, 18, 19, 20)
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Specification