Inspection method and inspection apparatus

• US 20050212044A1
• Filed: 01/21/2005
• Published: 09/29/2005
• Est. Priority Date: 03/19/2001
• Status: Active Grant

• Current Assignee: Semiconductor Energy Laboratory Co., Ltd.
• Original Assignee: Semiconductor Energy Laboratory Co., Ltd.
• Inventors: Hiroki, Masaaki
• Granted Patent: US 7,532,018 B2
• Time in Patent Office: Days
• US Class Current: 257/347
• CPC Class Codes: G01R 31/3025 Wireless interface with the DUT
• CPC Class Codes: G01R 31/315 by inductive methods
• CPC Class Codes: G09G 3/006 Electronic inspection or testing of displays and display drivers, e.g. of LED or LCD displays testing individual LED's G01R31/2635; testing lamps G01R31/44; testing of optical features of LCD displays G02F1/1309

Abstract

There is established an easier inspection method with which it is not required to set up probes on wires. Also, there is provided an inspection apparatus using this inspection method. With the inspection apparatus or inspection method, primary coils of an inspection substrate and secondary coils of a device substrate are superimposed on each other so that a certain space is maintained therebetween. An AC signal is inputted into the primary coils, thereby generating an electromotive force in each secondary coil by electromagnetic induction. Then, each circuit provided on the device substrate is driven using the electromotive force and information possessed by an electromagnetic wave or electric field generated in this circuit is monitored, thereby detecting each defective spot.

Claims

1-77. -77. (canceled)

78. A device comprising:

a circuit comprising a thin film transistor over a substrate;

a coil electrically connected to the circuit over the substrate.

84. A device according to claim 78,

wherein an AC voltage is generated between two terminals of the coil by electromagnetic induction, and

wherein the AC voltage is shaped or rectified to form a driving signal or a power supply voltage, and then, supplied to the circuit.

90. A device according to claim 78, wherein the circuit comprises a shift register, a level shifter and an analog switch.

96. A device according to claim 78, wherein the substrate has an insulating surface.

79. A device comprising:

a first circuit comprising a thin film transistor over a substrate;

a rectifier circuit electrically connected to the first circuit over the substrate;

a coil electrically connected to the rectifier circuit over the substrate.

85. A device according to claim 79,

wherein an AC voltage is generated between two terminals of the coil by electromagnetic induction, and

wherein the AC voltage is rectified by the rectifier circuit to form a power supply voltage, and then, supplied to the first circuit.

91. A device according to claim 79, wherein the first circuit comprises a shift register, a level shifter and an analog switch.

97. A device according to claim 79, wherein the substrate has an insulating surface.

80. A device comprising:

a first circuit comprising a thin film transistor over a substrate;

a waveform shaping circuit electrically connected with the first circuit over the substrate;

a coil electrically connected to the waveform shaping circuit over the substrate.

86. A device according to claim 80,

wherein an AC voltage is generated between two terminals of the coil by electromagnetic induction, and

wherein the AC voltage is shaped to form a driving signal, and then, supplied to the first circuit.

92. A device according to claim 80, wherein the circuit comprises a shift register, a level shifter and an analog switch.

98. A device according to claim 80, wherein the substrate has an insulating surface.

81. A device comprising:

a first circuit comprising a thin film transistor over a substrate;

a second circuit comprising a resister and a capacitor, electrically connected to the first circuit over a substrate; and

a coil electrically connected to the second circuit over the substrate.

87. A device according to claim 81,

wherein an AC voltage is generated between two terminals of the coil by electromagnetic induction, and

wherein the AC voltage is shaped by the second circuit to form a driving signal, and then, supplied to the first circuit.

93. A device according to claim 81, wherein the circuit comprises a shift register, a level shifter and an analog switch.

99. A device according to claim 81, wherein the substrate has an insulating surface.

82. A device comprising:

a first circuit comprising a thin film transistor over a substrate;

a second circuit comprising a diode, electrically connected to the first circuit over a substrate; and

a coil electrically connected to the second circuit over the substrate.

88. A device according to claim 82,

wherein an AC voltage is generated between two terminals of the coil by electromagnetic induction, and

wherein the AC voltage is shaped by the second circuit to form a driving signal, and then, supplied to the first circuit.

94. A device according to claim 82, wherein the circuit comprises a shift register, a level shifter and an analog switch.

100. A device according to claim 82, wherein the substrate has an insulating surface.

83. A device comprising:

a first circuit comprising a thin film transistor over a substrate;

a second circuit comprising a diode, a capacitor and a resister, electrically connected to the first circuit over a substrate; and

a coil electrically connected to the second circuit over the substrate.

89. A device according to claim 83,

wherein an AC voltage is generated between two terminals of the coil by electromagnetic induction, and

wherein the AC voltage is rectified by the second circuit to form a power supply voltage, and then, supplied to the first circuit.

95. A device according to claim 83, wherein the circuit comprises a shift register, a level shifter and an analog switch.

101. A device according to claim 83, wherein the substrate has an insulating surface.