High frequency reaction processing system
First Claim
1. A high frequency reaction processing system, comprising:
- an outer container made of dielectric material, formed so that two end faces can close a cavity;
one or more high frequency wave coupling portion located at an optional position on the outer face of the outer container;
one or more inner containers made of a dielectric material and formed so that two end faces can close a cavity and located without contacting the inner face of the outer container at a position to receive a high frequency wave traveling through a high frequency wave coupling portion; and
a covering portion made of conductive material and covering the outer face of the outer container except the area covered with the high frequency wave coupling portion and keeping a potential equal to the ground potential of a high frequency waveguide, and generating plasma in the cavity of the inner container.
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Accused Products
Abstract
A high frequency reaction processing system comprising an outer container (40) made of a dielictric material and having two end faces, which can close the inner cavity, one or more high frequency wave coupling portion (42) disposed at arbitrary position on the outer surface of the outer container (40), one or more inner container (41) made of a dielectric material and having two end faces, which can closeg the inner cavity, disposed at a position for receiving a high frequency wave guided through the high frequency wave coupling portion (42) without touching the inner side face of the outer container (40), and a covering portion (43) made of a conductive material, for covering the outer surface of the outer container except for the area occupied with the high frequency wave coupling portion (42) and sustaining the potential at a level equal to the ground potential of a waveguide line.
247 Citations
34 Claims
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1. A high frequency reaction processing system, comprising:
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an outer container made of dielectric material, formed so that two end faces can close a cavity;
one or more high frequency wave coupling portion located at an optional position on the outer face of the outer container;
one or more inner containers made of a dielectric material and formed so that two end faces can close a cavity and located without contacting the inner face of the outer container at a position to receive a high frequency wave traveling through a high frequency wave coupling portion; and
a covering portion made of conductive material and covering the outer face of the outer container except the area covered with the high frequency wave coupling portion and keeping a potential equal to the ground potential of a high frequency waveguide, and generating plasma in the cavity of the inner container. - View Dependent Claims (3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18)
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2. A high frequency reaction processing system, comprising:
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an outer container made of dielectric material, formed so that two end faces can close a cavity;
one or more high frequency wave coupling portion located at an optional position on the outer face of the outer container;
one or more inner containers made of a dielectric material and formed so that two end faces can close a cavity and located without contacting the inner face of the outer container at a position to receive a high frequency wave traveling through a high frequency wave coupling portion; and
a covering portion made of conductive material and covering the outer face of the outer container except the area covered with the high frequency wave coupling portion and keeping a potential equal to the ground potential of a high frequency waveguide, and carrying out a reaction process with an electromagnetic wave guided through the high frequency wave coupling portion in the cavity of the inner container. - View Dependent Claims (19, 20, 21, 22, 23, 24, 25, 26, 27, 28, 29, 30, 31, 32, 33, 34)
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Specification