Lithographic optical system
First Claim
1. A lithographic optical system, comprising a first housing including a first chamber, a first optically transmissive window, a second optically transmissive window, and at least one moveable lens positioned inside said first chamber;
- at least one gas exchange opening in communication with said first chamber; and
at least one additional optical element positioned outside said first housing, wherein an optical path is defined by said first optically transmissive window, said second optically transmissive window, said at least one moveable lens, and said at least one additional optical element.
1 Assignment
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Accused Products
Abstract
A lithographic optical system is presented herein. The optical system comprises a housing with two optically transparent windows and at least one moveable lens therein, as well as at least one other optical element outside said housing. By providing at least one optical element outside the housing, possible deleterious influences thereof on the optical quality of the moveable lens may be diminished. The housing with the moveable lens may be purged, and may be provided with a linear motor and a gas bearing for contactless moving of the lens.
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Citations
32 Claims
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1. A lithographic optical system, comprising
a first housing including a first chamber, a first optically transmissive window, a second optically transmissive window, and at least one moveable lens positioned inside said first chamber; -
at least one gas exchange opening in communication with said first chamber; and
at least one additional optical element positioned outside said first housing, wherein an optical path is defined by said first optically transmissive window, said second optically transmissive window, said at least one moveable lens, and said at least one additional optical element. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 24)
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25. A lithographic optical system, comprising:
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a first housing including a first chamber inside said first housing, a radiation source, a first optically transmissive window, and at least one moveable lens in said first chamber;
at least one gas exchange opening in communication with said first chamber; and
at least one additional optical element positioned outside said first housing, wherein an optical path is defined by said radiation source of radiation, said at least one moveable lens, said first optically transmissive window, and said at least one additional optical element. - View Dependent Claims (26)
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27. A lithographic apparatus, comprising:
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a radiation system configured to provide a beam of radiation, said radiation system including;
a first housing including a first chamber, a first optically transmissive window, a second optically transmissive window, and at least one moveable lens positioned inside said first chamber, at least one gas exchange opening in communication with said first chamber, and at least one additional optical element positioned outside said first housing, wherein an optical path is defined by said first optically transmissive window, said second optically transmissive window, said at least one moveable lens, and said at least one additional optical element;
a support structure configured to support a patterning device that imparts a desired pattern onto said beam of radiation;
a substrate holder configured to hold a substrate; and
a projection system configured to project said patterned beam onto a target portion of said substrate. - View Dependent Claims (28)
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29. A lithographic apparatus, comprising:
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a radiation system configured to provide a beam of radiation, said radiation system including;
a first housing including a first chamber inside said first housing, a radiation source, a first optically transmissive window, and at least one moveable lens in said first chamber, at least one gas exchange opening in communication with said first chamber, and at least one additional optical element positioned outside said first housing, wherein an optical path is defined by said radiation source of radiation, said at least one moveable lens, said first optically transmissive window, and said at least one additional optical element;
a support structure configured to support a patterning device that imparts a desired pattern onto said beam of radiation;
a substrate holder configured to hold a substrate; and
a projection system configured to project said patterned beam onto a target portion of said substrate. - View Dependent Claims (30)
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31. A lithographic apparatus, comprising:
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a radiation system configured to provide a beam of radiation, said radiation system including;
a support structure configured to support a patterning device that imparts a desired pattern onto said beam of radiation;
a substrate holder configured to hold a substrate; and
a projection system configured to project said patterned beam onto a target portion of said substrate, said projection system comprising, a first housing including a first chamber, a first optically transmissive window, a second optically transmissive window, and at least one moveable lens positioned inside said first chamber, at least one gas exchange opening in communication with said first chamber, and at least one additional optical element positioned outside said first housing, wherein an optical path is defined by said first optically transmissive window, said second optically transmissive window, said at least one moveable lens, and said at least one additional optical element. - View Dependent Claims (32)
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Specification