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Lithographic optical system

  • US 20050213060A1
  • Filed: 03/24/2004
  • Published: 09/29/2005
  • Est. Priority Date: 03/24/2004
  • Status: Active Grant
First Claim
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1. A lithographic optical system, comprising a first housing including a first chamber, a first optically transmissive window, a second optically transmissive window, and at least one moveable lens positioned inside said first chamber;

  • at least one gas exchange opening in communication with said first chamber; and

    at least one additional optical element positioned outside said first housing, wherein an optical path is defined by said first optically transmissive window, said second optically transmissive window, said at least one moveable lens, and said at least one additional optical element.

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