Apparatus for modulating a light beam

• US 20050213192A1
• Filed: 05/24/2005
• Published: 09/29/2005
• Est. Priority Date: 11/28/2002
• Status: Abandoned Application

• Current Assignee: Optical Metrology Patents Ltd. (KLA Corporation)
• Original Assignee: Optical Metrology Patents Ltd. (KLA Corporation)
• Inventors: Kelly, Patrick Vincent, Murtagh, Martin Edward
• Application Number:
  US11/135,269
• Publication Number:
  US 20050213192A1
• Time in Patent Office: Days
• US Class Current: 359/298
• CPC Class Codes: G01J 3/02 Details
• CPC Class Codes: G01J 3/0224 using polarising or depolarising elements
• CPC Class Codes: G01J 3/1256 using acousto-optic tunable filter; acousto-optic elements or systems G02F1/11, G02F1/33
• CPC Class Codes: G01J 3/433 Modulation spectrometry; Derivative spectrometry
• CPC Class Codes: G01N 2021/1725 Modulation of properties by light, e.g. photoreflectance
• CPC Class Codes: G02F 1/292 by controlled diffraction or phased-array beam steering controlled diffraction for optical switching G02F1/31
• CPC Class Codes: G02F 1/33 Acousto-optical deflection devices circuit or control arrangements therefor G02F1/113

Abstract

A modulation spectroscopy system (1) has an acousto-optic modulator (5) providing a pump beam onto a sample. The modulator receives a light beam from a source (4) and diffracts it to provide an output which is the first order beam, the zeroth order or undeflected beam being terminated and the 2nd and higher orders being negligible and terminated also. The modulator is driven alternately by two drive frequencies at a modulation or toggle frequency. The first order output is at one angle for a first drive frequency and at another angle for the other drive frequency. The duty cycle of alternating between the different drive frequencies sets the output beam position duty cycle for incidence at two different spots on the sample. Also, either or both beams may be position and/or intensity varied by control of the modulator drive frequencies and their amplitudes.

Claims

1. A light beam modulator comprising means for modulating a source beam to provide an output beam at any one time on one of a plurality of discrete paths according to a modulation scheme.

2. A light beam modulator as claimed in claim 1, wherein the modulator operates such that an output beam is always directed onto one of the paths, in which during switching between said paths a beam is absent from both paths for no longer than a time which is short compared to a characteristic response time of a detector of the output beams.

3. A light beam modulator as claimed in claim 1, wherein the paths are deflected from the direction of the source beam or undeflected (zeroth order) beam.

4. A light beam modulator as claimed in claim 1, wherein the output beam comprises first order diffracted light from the source beam.

5. A light beam modulator as claimed in claim 1, wherein the output beam comprises first order diffracted light from the source beam;

and wherein the modulator comprises an acousto-optic crystal and a drive circuit which switches between different drive frequencies at a modulation or toggle frequency.

6. A light beam modulator as claimed in claim 1, wherein the output beam comprises first order diffracted light from the source beam;

and wherein the modulator comprises an acousto-optic crystal and a drive circuit which switches between different drive frequencies at a modulation or toggle frequency; and

wherein the drive circuit provides a drive frequency change duty cycle corresponding to a desired beam output duty cycle for switching between the paths.

7. A light beam modulator as claimed in claim 1, wherein the output beam comprises first order diffracted light from the source beam;

and wherein the modulator comprises means for setting the degree of deflection of one or all of the discrete paths.

8. A light beam modulator as claimed in claim 1, wherein the output beam comprises first order diffracted light from the source beam;

and wherein the modulator comprises means for setting the degree of deflection of one or all of the discrete paths; and

wherein the modulator comprises means for setting the degree of deflection according to an applied drive signal frequency for the crystal.

9. A light beam modulator as claimed in claim 1, further comprising means for controlling intensity of the output beam on one or both paths.

10. A light beam modulator as claimed in claim 1, further comprising means for controlling intensity of the output beam on one or both paths;

and wherein the modulator comprises an acousto-optic crystal and drive circuit and the drive circuit comprises control means for changing amplitude of the applied driver signal frequency for the relevant path or paths.

11. A light beam modulator as claimed in claim 1, wherein the output beam comprises first order diffracted light from the source beam;

and wherein the modulator further comprises a position feedback loop comprising an output beam spot detector connected to a modulator drive means for changing path of a beam according to feedback from the detector.

12. A light beam modulator as claimed in claim 1, wherein the output beam comprises first order diffracted light from the source beam;

and wherein the modulator further comprises a position feedback loop comprising an output beam spot detector connected to a modulator drive means for changing path of a beam according to feedback from the detector; and

wherein the detector is a position sensitive detector comprising a quadrant photodiode operated in differential mode.

13. A light beam modulator as claimed in claim 1, wherein the output beam comprises first order diffracted light from the source beam;

and wherein the modulator further comprises an intensity feedback loop comprising an output beam intensity detector connected to a modulator drive means for changing intensity of one or both beams according to feedback.

14. A light beam modulator as claimed in claim 1, wherein the output beam comprises first order diffracted light from the source beam;

and wherein the modulator further comprises an intensity feedback loop comprising an output beam intensity detector connected to a modulator drive means for changing intensity of one or both beams according to feedback; and

wherein the intensity detector comprises a quadrant photodiode operated in summation mode.

15. A light beam modulator as claimed in claim 1, wherein the output beam comprises first order diffracted light from the source beam;

and wherein the modulator comprises means for terminating a residual part of the source beam.

16. A light beam modulator as claimed in claim 1, wherein the output beam comprises first order diffracted light from the source beam;

and wherein the modulator comprises means for terminating a residual part of the source beam; and

wherein the residual part is an order other than the first order.

17. A light beam modulator as claimed in claim 1, wherein the output beam comprises first order diffracted light from the source beam;

and wherein the modulator comprises means for terminating a residual part of the source beam; and

wherein the residual part is an order other than the first order; and

wherein the modulator provides the zero order output in a default mode without drive power and said order is terminated.

18. A light beam modulator as claimed in claim 1, wherein the modulator comprises a programmably electro-mechanically, electro-optically, or piezoelectrically variable diffractive optic element for switching the output beam between the paths.

19. A light beam modulator as claimed in claim 1, wherein the modulator comprises a programmably electro-mechanically, electro-optically, or piezoelectrically variable diffractive optic element for switching the output beam between the paths;

and wherein the modulator comprises means for switchably rotating the plane of polarisation of a linearly polarised pump beam, and routing means for causing the beam to traverse a different spatial path for each polarisation.

21. A light beam modulator as claimed in claim 1, wherein the modulator comprises a programmably electro-mechanically, electro-optically, or piezoelectrically variable diffractive optic element for switching the output beam between the paths;

and wherein the modulator comprises means for switchably rotating the plane of polarisation of a linearly polarised pump beam, and routing means for causing the beam to traverse a different spatial path for each polarisation; and

wherein the rotating means comprises a spatial light modulator controlled by a drive voltage.

22. A light beam modulator as claimed in claim 1, wherein the modulator comprises a programmably electro-mechanically, electro-optically, or piezoelectrically variable diffractive optic element for switching the output beam between the paths;

and wherein the modulator comprises means for switchably rotating the plane of polarisation of a linearly polarised pump beam, and routing means for causing the beam to traverse a different spatial path for each polarisation; and

wherein the rotating means comprises a spatial light modulator controlled by a drive voltage; and

wherein the rotating means comprises a liquid crystal spatial light modulator.

23. A light beam modulator as claimed in claim 1, wherein the modulator comprises a programmably electro-mechanically, electro-optically, or piezoelectrically variable diffractive optic element for switching the output beam between the paths;

and wherein the modulator comprises means for switchably rotating the plane of polarisation of a linearly polarised pump beam, and routing means for causing the beam to traverse a different spatial path for each polarisation; and

wherein the rotating means comprises a spatial light modulator controlled by a drive voltage; and

wherein the rotating means comprises a ferroelectric spatial light modulator.

24. A light beam modulator as claimed in claim 1, wherein the modulator comprises a programmably electro-mechanically, electro-optically, or piezoelectrically variable diffractive optic element for switching the output beam between the paths;

and wherein the modulator comprises means for switchably rotating the plane of polarisation of a linearly polarised pump beam, and routing means for causing the beam to traverse a different spatial path for each polarisation; and

wherein the rotating means comprises a Wollaston Prism.

25. A light beam modulator as claimed in claim 1, wherein the modulator comprises a programmably electro-mechanically, electro-optically, or piezoelectrically variable diffractive optic element for switching the output beam between the paths;

and wherein the modulator comprises means for switchably rotating the plane of polarisation of a linearly polarised pump beam, and routing means for causing the beam to traverse a different spatial path for each polarisation; and

wherein the rotating means comprises a polarising beam splitter.

26. A modulation spectroscopy system comprising a modulator as claimed in claim 1.

27. A laser blocking system comprising a modulator as claimed in claim 1 and a means for safely terminating a zero order output, and an interlock mechanism connected to shut power from the modulator (acousto-optic) if an unsafe event occurs, causing only the zeroth order to be output and safely terminated.

20. A light beam modulator as claimed in 1, wherein the modulator comprises a programmably electro-mechanically, electro-optically, or piezoelectrically variable diffractive optic element for switching the output beam between the paths;

and wherein the modulator comprises means for switchably rotating the plane of polarisation of a linearly polarised pump beam, and routing means for causing the beam to traverse a different spatial path for each polarisation; and

wherein the rotating means comprises a Pockels Cell controlled by a drive voltage.