Broad-angle multilayer mirror design
First Claim
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1. A broad-angle multilayer (ML) mirror comprising a multiple layer structure to provide uniform reflectivity over a wide range of angles with small phase shifts.
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Abstract
According to one embodiment a broad-angle multilayer (ML) mirror system is disclosed. The ML mirror includes a multiple layer structure configured to provide uniform reflectivity over a wide range of angles with small phase shifts.
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Citations
26 Claims
- 1. A broad-angle multilayer (ML) mirror comprising a multiple layer structure to provide uniform reflectivity over a wide range of angles with small phase shifts.
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11. An optical system having an extreme ultra-violet (EUV) radiation source, the system comprising:
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a mask;
a wafer; and
a plurality of reflecting surfaces for imaging the mask on the wafer, wherein one or more of the plurality of reflecting surfaces includes a broad-angle multilayer (ML) mirror having a multiple layer structure to provide uniform reflectivity over a wide range of angles with small phase shifts. - View Dependent Claims (12, 13, 14, 15, 16, 17, 18, 19)
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20. An optical system having an extreme ultra-violet (EUV) radiation source, the system comprising:
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a mask;
a wafer; and
a plurality of reflecting surfaces for imaging the mask on the wafer, including;
a first mirror;
a second mirror, a third mirror having a multiple layer structure to provide uniform reflectivity over a wide range of angles with small phase shifts;
a fourth mirror;
a fifth mirror; and
a sixth mirror. - View Dependent Claims (21, 22, 23, 24, 25, 26)
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Specification